摘要
本實驗以溶凝膠法(sol-gel)法鍍製異質多層鋯鈦酸鉛(PZT)鐵電薄膜，設計多種不同堆疊方式的多層結構，探討各種結構的結晶行為、鐵電特性、介電特性、抗疲勞特性、時效特性及漏電流性質。實驗所使用的基板為Pt/Ti/SiO2/Si，期望能利用多層結構的方式改善PZT薄膜應用在白金電極上的各項問題。

實驗結果顯示，富鈦PZT(20/80)層能有效降低PZT(53/47)及PZT(80/20)的Perovskite相結晶溫度至600℃。SIMS結果發現，Sol-gel法鍍製的PZT異質多層薄膜，會因結晶順序不同造成成分偏移，因而形成的中間富鋯層會影響薄膜的性質。

異質多層結構中，PZT(20/80)/PZT(80/20)介面能提高薄膜的介電常數，而因結晶順序不同形成的中間富鋯層對介電特性影響很大。鐵電特性方面，PZT(20/80)/PZT(80/20)介面和中間富鋯層均能改善異質多層薄膜的鐵電性質，比較所有異質多層結構，PZT2/8/5/8/2的鐵電特性最佳。

PZT2/5/2、PZT2/8/5/8/2及PZT8/2/5/2/8異質多層薄膜，介電特性及鐵電特性有時效情形發生，低溫時效退火處理可消除此現象。PZT2/8/5/8/2於600℃熱處理的薄膜，時效處理後仍有很好的鐵電特性，在外加電壓為300KV/cm下，殘留極化量為14.6μC/cm^2，矯頑電場為66.7KV/cm。

異質多層結構中，PZT2/8/5/8/2薄膜有最佳的抗疲勞性質，可承受3E10次電場反轉。此外，亦有相當好的漏電流性質，在電壓6伏情況下，可以有小於1E-7A/cm^2的漏電流。

本實驗設計的PZT2/8/5/8/2異質多層結構，有優良的鐵電特性、抗疲勞特性及低的漏電流，提高了PZT鐵電薄膜應用於白金電極上的可行性。

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