靜電驅動之微懸臂樑疲勞特性研究｜國立清華大學博碩士論文庫

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研究生：	林逸群 Yi-Chun Lin
論文名稱：	靜電驅動之微懸臂樑疲勞特性研究 Fatigue of an Electrostatically Driven Microcantilever Beam
指導教授：	賀陳弘 Hong Hocheng
口試委員:
學位類別：	碩士 Master
系所名稱：	工學院 - 動力機械工程學系 Department of Power Mechanical Engineering
論文出版年：	2004
畢業學年度：	93
語文別：	英文
論文頁數：	87
中文關鍵詞：	微懸臂樑、疲勞、多晶矽、靜電驅動、材料性質、機械性質
外文關鍵詞：	Microcantilever Beam, Fatigue, Mechanical Properties, Electrostatic Force, Reliability
相關次數：	點閱：4 下載：0
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隨著微機電技術日漸成熟，逐漸商品化的同時，對微觀元件的機械性質之重要性也隨之提高，以期達到壽命長、可靠度高的目標。材料之機械性質在巨觀世界中已經為所研究，但在微小尺度下，其機械疲勞特性，需要進一步的分析與量測，以達到產品高可靠度、高品質的水準。本論文主要探討在微機電系統中被廣泛運用的結構－多晶矽微懸臂樑的疲勞性質。運用微機電製程技術發展出重製性高、容易製造之試片，以靜電驅動的方式使懸臂樑產生震動，研究其壽命與破斷強度，分析其疲勞現象，建構起不同尺寸形狀下所對應之疲勞曲線（S-N diagram），進而瞭解多晶矽之材料疲勞性質，以提供日後學者與設計者參考。本疲勞研究之試件結構為一懸臂樑（長60-100μm，寬20μm，厚度2μm），其自由端連結一靜電平板（面積500×500及560×560μm^2，厚度2μm），在電壓150及200 V，頻率100 Hz數位波之靜電場下產生均勻的靜電負載施加於試件上，並以雷射都普勒儀紀錄其位移量。由實驗與ANSYS之分析模擬結果，可以得知懸臂樑自由端之變形量會隨著結構長度增長或平板面積增加而上升，其值介於61.3–597.8 nm；試件之疲勞壽命則與固定端之最大應力值呈現近似線性反比之趨勢。固定端之最大應力值介於14.3–32.0 MPa；疲勞壽命則介於6.1×10^6–1.4×10^8 cycles。

With advancement of MEMS technology, the reliability of a microstructure has become a vital issue before a microdevice is widely accepted. Consequently, it is indispensable to understand the mechanical properties of a microstructure to meet the requirements of longer lifetime and reliable performance. This study investigates the fatigue characteristics of a microcantiliever beam (60-120μm long, 20μm wide, 2μm thick), one of the most common microstructures widely employed in sensors and actuators. Furthermore, a pad (500×500×2 and 560×560×2μm3 ), fabricated at the free end of the beam, is used for larger external electrostatic load generated between the specimen and the electrode with an air gap 525μm. In fatigue test, the specimen actuated by the applied voltage 150 and 200 V in the form of the digital wave at 100 Hz. The deflection of the beam is measured by the laser Doppler vibrometer. According to the experimental and ANSYS results, the displacement of the free end of the beam increases with the beam length, ranging from 61.3 to 597.8 nm; from S-N diagram, the maximum stress is inversely proportional to the corresponding fatigue life. The maximum stress occurs at the fixed end of the specimen between 14.3–32.0 MPa; the fatigue life lies between 6.1×10^6–1.4×10^8 cycles.

FIGURE CAPTIONS                                          III
TABLE CAPTIONS                                          VIII
NOMENCLATURE                                              IX
Chapter 1 Introduction                                     1
1.1 Motivation                                             1
1.2 Background                                             2
1.3 Objective                                              5
Chapter 2 Literature Reviews                               7
2.1 Fabrication Techniques                                 7
2.2 Measurement of Mechanical Properties                   9
2.2.1 Tensile Test                                        10
2.2.2 Bending Test                                        14
2.2.3 Fatigue Test                                        16
Chapter 3 Predictions of Fatigue Behavior                 24
3.1 Beam Analysis                                         24
3.2    Fatigue Theory                                     31
3.3 ANSYS Simulation                                      35
Chapter 4 Experiment                                      37
4.1 Specimen Preparation                                  37
4.1.1 Selection of Material and Fabrication Method        37
4.1.2 Design of the Specimen                              38
4.1.3 Fabrication Process                                 42
4.1.4 Specimen Structure                                  48
4.2 Measurement                                           51
Chapter 5 Results and Discussions                         56
5.1 Specimen Resonance                                    56
5.2 Neck Deflection                                       58
5.3 Maximum Beam Stress and Neck Stress                   66
5.4 Fatigue Test                                          73
Chapter 6 Conclusions and Suggestions for Future Research 78
6.1 Conclusions                                           78
6.2 Suggestions for Future Research                       79
Reference                                                 81
Appendix                                                  85

                                

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