機台－製程群組配置係指哪幾類配方應該在哪幾組機台群進行加工。在如半導體產業這種高度產品變異的迴流生產系統中，最佳化機台與製程的分組是相當複雜的工作。本研究提出一個同時考慮組間可重疊、機台可利用率以及最小化整備與等候時間之演算法，以數學模型估計機台可利用率變動下，整體的整備與等候時間，並建立可允許重疊的機台分群方式。粒子群最佳化演算法(PSO)的技巧，被用來做為特定時段生產需求下，最小化目標式的解題工具，而模擬模型則是用來衡量以PSO所得出之群組結果的績效值。四項績效指標為產出、在製品數量、生產週期時間與達交率。將台灣晶圓代工廠的真實生產資料導入以測試結果，演算法能找出相較於不重疊分組與案例公司原始分組，績效顯著改善的群組方式。研究顯示，無論工件來到率與機台可利用率如何變動，允許跨組重疊呈現較優的績效。本研究的貢獻包含：
1. 在高度迴流與高產品變異性的製造系統中，允許跨組重疊與機台可利用率變動，建立一可動態調整的演算法，以解決複雜的機台－製程群組配置問題。
2. 為晶圓廠辨識出大幅改善績效的群組配置方式。

Machine-process grouping refers to what group of process should be processed in what group of machines. In highly reentrant high-product-variety production systems such as semiconductor manufacturing, optimization for machine-process grouping is very complex. This research proposed a grouping algorithm considering group overlapping, machine set-up and waiting times minimization, and machine availability. Mathematical models to estimate overall set-up time, waiting time under various machine availabilities and possible overlapping of machines grouping were established. Particle Swarm Optimization (PSO) technique was used to solve the minimization of a given period of production requirements. Flexsim simulation models were used to evaluate the performance of the grouping solutions generated by the PSO. The four performances indices observed are Throughput, WIP, Cycle Time and delivery rate. Real-world production data from a fab of a major Taiwanese Foundry were used to test the results. The algorithm was able to identify better grouping than non-overlapping and the company’s original grouping arrangement with significant improvements. The results indicated that regardless of the arrival rates and availability rates, allowing grouping overlap showed better performances. Contributions of this research include:
1. Establishing a dynamically adjustable algorithm to solve a complex machine-process grouping problem in highly re-entrant and high-product-variety fabrications allowing overlapping and availability variations.
2. Identifying a much improved grouping arrangement for the fab.

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