在當今科技快速進步的時代，半導體產業蓬勃發展，使得晶片在我們的日常生活中扮演著不可或缺的角色。這種影響尤其體現在感測器技術的廣泛應用上。無論是加速度計、觸覺感測器還是光感測器，這些微小但功能強大的裝置無處不在，默默地為我們提供各種重要數據和信息。
近年來，隨著人們對健康和醫療的關注日益增加，生醫感測器的重要性也逐漸凸顯。此類感測器能夠監測人體各項生理指標，為醫療診斷和健康管理提供寶貴的數據支持。歸功於現代科技的進步使得許多生醫感測器能夠和傳統CMOS製程相整合不僅大大縮小了晶片的體積，還顯著提高了感測的精確度和靈敏度。技術的相容為醫療設備的微型化和智能化開闢了新的道路，使得更多便攜、高效的醫療監測設備成為可能。從而為患者提供更便利、更準確的健康監測服務，同時也為醫療專業人員提供了更多的診斷和治療工具。
本研究以氮化鈦為感測層之延伸電極場效電晶體( TiN-based Extended-Gate Field Effect Transistors, EGFET)來進行DNA與pH值感測之探討，總陣列數為4 × 4個EGFET，將量測不同濃度之pH緩衝溶液以及於不同濃度磷酸鹽緩衝水溶液中量測B型肝炎病毒DNA分子。
在不同pH值緩衝溶液下，本研究量測到pH值的最高感測度為52.6 mV/pH。而B型肝炎DNA分子的量測，本研究感測10-16 M~10-11 M的DNA分子，於1X PBS，溶液下，TiN EGFET的最高臨界電壓變化為30.45 mV/〖/log〗_10[DNA]；於0.01X PBS溶液下，TiN EGFET的臨界電壓變化為31.82 mV/〖/log〗_10[DNA]。

In today's era of rapid technological advancement, the semiconductor industry has flourished, making integrated circuits an indispensable part of our daily lives. This influence is particularly evident in the widespread application of sensor technologies. Whether they are accelerometers, tactile sensors, or optical sensors, these tiny yet powerful devices are ubiquitous, silently providing us with various crucial data and information.
In recent years, with increasing attention to health and medical care, the importance of biomedical sensors has become increasingly prominent. These sensors can monitor various physiological indicators of the human body, providing valuable data support for medical diagnosis and health management. Thanks to modern technological advances, many biomedical sensors can now be integrated with traditional CMOS manufacturing processes, which not only significantly reduces chip size but also notably improves sensing precision and sensitivity. This technological compatibility has paved the way for the miniaturization and intelligence of medical devices, making more portable and efficient medical monitoring equipment possible. This development provides patients with more convenient and accurate health monitoring services while offering healthcare professionals additional diagnostic and treatment tools.
This research investigates DNA and pH sensing using TiN-based Extended-Gate Field Effect Transistors (EGFET), featuring a sensing array of 4×4 EGFETs, to measure various concentrations of pH buffer solutions and detect Hepatitis B virus DNA molecules in different concentrations of phosphate-buffered saline solutions. Under different pH buffer solutions, this study measured a maximum pH sensitivity of 52.6 mV/pH. For Hepatitis B DNA molecule measurements, the research detected DNA molecules in concentrations ranging from 10-16 M to 10-11 M. In 1X PBS solution, the TiN EGFET showed a maximum threshold voltage change of 30.45 mV/[DNA], while in 0.01X PBS solution, the threshold voltage change was 31.82 mV/[DNA].

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