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研究生: 侯繻凱
Hsu Kai Hou
論文名稱: 偏振移相式點繞射干涉儀應用於光學鏡片之光程分析
Analysis of Optical Path Differences in Lenses by Polarization Phase-shifting Point-diffraction Interferometer
指導教授: 王培仁
Pei Jen Wang
口試委員:
學位類別: 碩士
Master
系所名稱: 工學院 - 動力機械工程學系
Department of Power Mechanical Engineering
論文出版年: 2008
畢業學年度: 96
語文別: 中文
論文頁數: 74
中文關鍵詞: 點繞射干涉儀偏振光程差澤爾尼克多項式
外文關鍵詞: Point-diffraction Interferometer, Polarization Phase-shifting, Optical Path Differences, Zernike Polynomials
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  • 近年來射出成型技術在光學鏡片上的生產應用已經逐漸成為趨勢,此技術能達到鏡片快速生產的目標,而如何快速量測鏡片也是目前發展的重點。本文將針對於縮短光路與量測鏡片進行光程差的探討,期望能夠達到以鏡片光程差評估此鏡片之光學規格;故以點繞射干涉儀作為鏡片檢測平台,以共光路式的點繞射干涉儀架構隔絕震動、空氣擾動等環境影響,並捨棄使用精密且昂貴的參考透鏡,利用偏振技術設計相位移動干涉法來提升量測數據的準確性;在波前還原的過程中,本文使用澤爾尼克多項式(Zernike Polynomials)進行波前擬合,取得還原鏡片波前來進行光程差,並重覆實驗驗證此光學量測平台的可靠性,更加以探討電耦合元件(CCD)對本光學檢測平台的影響,以期對光學鏡片的量測技術有所貢獻。


    Due to the fast development in injecting molding process, mass production of optical lenses has become very affordable and achievable. In the production process, efficient measurement in optical qualities has been the key research topic today. In this thesis, major efforts are contributed to the discussions of optical path difference (OPD) of lenses and setting a standard for the measurement of OPD. Based upon the principle of point-diffraction interferometer, it is well-known that little environmental influence can disturb the measured results and no costly reference lens is needed. This study investigates mainly the tests of standard plano-convex lenses via a polarization phase-shifting scheme for accuracy improvement. During the wave-front reconstruction, we use Zernike polynomials in numerical simulations and verification experiments for better data interpretation. This study confirms system reliability by repeating tests; also, it discusses the effects given by CCD camera performance. Finally, we have established an accountable reference for tests of optical lenses

    第一章 簡介 1 1-1 研究背景 1 1-2 研究目的 2 1-3 文獻回顧 3 第二章 理論介紹 10 2-1 基本干涉原理 10 2-2 基本繞射原理 11 2-3 點繞射干涉儀簡介 13 2-4 偏振移相式點繞射干涉儀分析 15 2-4-1 偏振式點繞射片 15 2-4-2 移相機制 17 2-5 移相法 18 2-5-1 移相公式與相位修正 18 2-5-2 相位展開 19 2-6 波前理論分析 22 2-6-1 待測波前推導 22 2-6-2 澤爾尼克多項式 23 2-6-3 相位分布轉澤爾尼克多項式 25 第三章 量測系統之光學模擬 35 3-1 光學模擬軟體介紹 35 3-2 模擬架構與參數設定 35 3-3 模擬結果 36 3-4 波前還原結果 37 3-5 非球面鏡片模擬 37 第四章 量測實驗與結果 45 4-1 實驗設備 45 4-2 實際量測實驗過程 48 4-2-1 對心共光軸校正 48 4-2-2 平行光校正 49 4-3 實驗量測方法 50 4-4 實驗結果與討論 52 4-4-1 鏡片鍍膜 53 4-4-2 CCD動態範圍測試 54 4-4-3 CCD動態範圍測試實驗規劃 55 4-4-4 CCD動態範圍測試實驗結果 55 4-5 重覆性測試 57 4-6 模擬與實驗結果比較 57 4-7 射出成型塑膠平凸鏡片量測 58 第五章 討論與未來工作 70 5-1 結果與討論 70 5-2 未來工作 71 參考文獻 73

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