去氧核糖核酸分子(DNA)攜帶著遺傳密碼，在自然界裡在生命體上扮演著重要的角色。不僅僅如此，由於其雙股螺旋的半徑約為2奈米，單股與單股去氧核糖核酸分子間的鹼基具有專一性的配對也比其他的生物分子，使去氧核糖核酸成為重要的奈米材料，且由於生物技術的發達使我們可以任意的設計去氧核糖核酸分子的序列，使得近年來去氧核糖核酸分子在奈米科技上的應用非常廣。例如：利用去氧核糖核酸分子為骨幹再利用金屬氧化還原的反應做成的奈米導線;以去氧核糖核酸分子當作連接連接器連接奈米金顆粒。
在過去的雖然有各式各樣的奈米元件產生，但是如何讓奈米元件在特定的位置上呈現，仍為奈米科技發展的一個重要的挑戰。所以在過去的幾年間，有一些方法被提出來解決控制奈米的結構在特定的位置生成，但不可避免的，大部分的方式仍有相當的限制性或是缺點。因此在本篇論文中我們主要利用電子顯微束的方式使去氧核糖核酸分子排列在特定的位置並且產生圖形。
我們在此提出了兩種利用電子顯微術來定位去氧核糖核酸分子的方法。 第一,利用再經由電子槍發射出來的電子束直接破壞在與金表面鍵結上的去氧核糖核酸分子 。第二，利用電子束在玻璃表面所產生的靜電力來吸引去氧核糖核酸分子。利用電子束的方式來圖案化可以精準的控制生物分子的位置，也可以產生各式各樣的圖形，穩定度高。這對於後續整合半導體生產技術與以去氧核糖核酸為主的米生物元件的發展有相當的應用。

DNA carries genetic information, and is a very important material for lives. DNA is nano-size in nature and, more importantly, its specific base paring mechanism makes DNA a fascinating material in nanoscience. Moreover, due to the mature programmable synthesis skill of DNA, taking DNA as a constructing material has attracted great interest in recent years, such as DNA-based nanowires, programmed assembly of DNA-conjugated gold nanoparticles. Although, various nanodevices have been presented by previous researches, fabricating well localized nano structure at the desired places is still a great challenge. In order to solve the problem of precise positioning, numbers of DNA-patterning methods have been proposed. However, most proposed methods still have some limitations and disadvantages.
In our research, we aim at the developing an electron beam patterning method to generate DNA patterns at desired location. Two E-beam based approaches are proposed to produce precise DNA patterns in this thesis. First, we directly generate DNA patterns on gold substrate by the deformation of DNA via electron beam bombardment. Second, we pattern DNA on electrified patterns of glass substrate by electron beam induced charges. By using these two techniques, we can simply and precisely locate DNA and on the surface and generate variety of DNA patterns with high stability. This is a step towards possible integration of DNA-based techniques use into regular semiconductor fabrication methods.

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