摘要
隨著科技的進步以及時代的演進，個人儲存的需求越來越高，其中光儲存依舊扮演了重要的角色。目前光儲存的目標除了希望儲存容量加大之外，隨著個人化攜帶式的資訊產品蓬勃發展，微小化、輕量化也是發展的重點。為了達到這些目標，必須提升光學讀寫頭的技術，但是以目前的光學讀寫頭技術似乎遇到了難以解決的瓶頸。為了尋求解決之道，本文希望藉由微機電系統技術來達到未來的目標，因為機電技術本身的元件特性就是微小化、輕量化、動態響應快、精準度高、批量製造等等。
本文以光學讀寫頭中致動器的部分為研究目標。在光學讀寫頭當中，需要具備有同平面運動的循軌致動器以及出平面運動的聚焦致動器。本文利用微機電中面型微加工技術以及體型微加工來製造出同平面及出平面大位移致動器。此外，還期望將兩種致動器整合在同一元件上面，並且在致動時能夠獨立操控且互不偶合。並且將光學透鏡整合於微機電元件當中，讓元件擁有光學上的性能。
本文將提出的設計概念主要是利用電磁式致動器以及電熱式致動器來達成致動目標。

關鍵字：光學讀寫頭、微機電系統、微致動器。

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