隨著神經電生理學的發展，具有小體積且帶有高電極密度的神經探針開始成為研究上重要的工具。隨神經探針發展，雖然神經探針尺度縮小、電極密度增加，造成的傷口也變小，但絕大部分的探針仍採用相對於組織較硬的材料，如：矽、玻璃等，仍容易產生撕裂傷，後來的研究雖有利用高分子材料讓探針軟化，但高分子探針容易在穿刺的時候偏離目標，讓操作精度下降。後期提出探針硬化的技術，卻又並不完全與半導體製程相容，甚至會造成操作上的困難。故本篇論文提出使用聚對二甲苯(Parylene)熱接合的技術，製作出空氣填充式的軟性聚對二甲苯探針，冀能解決前述神經探針之缺點，並為未來活體的長期量測提供良好的解決方法。

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