本論文研究以有機金屬溶液(有機鐵和有機鎳)，旋鍍於矽基板上作為成長奈米碳管的催化劑來源，以微波加熱的系統來達到快速升溫的效果。研究中改變不同參數來研究前處理對催化劑表面型態的影響，各種不同成長參數對於成長碳管的外觀和性質的影響。成長的碳管膜以掃瞄式電子顯微鏡觀察其表面狀態，穿透式電子顯微鏡作結構分析，拉曼光譜分析奈米碳管的結晶性，並以二極方式量測其場發射性質。
有機鐵膜經氫氣(10%)或是氨氣的高溫還原後，成為尺寸大小為40-130奈米的顆粒，再通入甲烷氣體後可以成功的成長奈米碳管。將有機鐵溶液混和光組液後，經旋鍍、曝光、顯影後，可以將奈米碳管擇區成長。有機鎳膜則可以不經過高溫還原的過程而直接成長奈米碳管，央有機鎳膜在甲烷和氮氣的混和氣體中升溫到900度，有機鎳膜會自行裂解而成鎳顆粒，奈米碳管可藉由金屬鎳的催化成長，經過20分鐘的成長，碳管膜會由原先向上成長的一層轉變為上下都成長的兩層膜，藉由電子顯微鏡的觀察，提出一套合適的成長機制。
碳管的密度和管徑大小也可以藉由控制有機溶液的濃度來達成，而且有機金屬溶液可以旋鍍在不同材質的基板上，奈米碳管膜成長於鈦薄膜上，其場發射起始電場為1.5 V/μm，電流密度可達1 mA。

Fe and Ni organic solutions were used as the catalyst source for growing carbon nanotubes. The effect of concentrations of the organic solution and the composition of the gases used in pretreatment on the resulted carbon nanotubes were studied. The carbon nanotubes were examined by electron microscopy and characterized by their field emission properties and Raman spectra.
Carbon nanotubes can grow on iron particles formed by reduction in 10% hydrogen-nitrogen or ammonia gas. By mixing the organic iron solution with photo-resist materials in a standard lithographic patterning process, the patterned organic iron film can be formed which has been used to grow carbon nanotubes successfully.
Organic nickel films can be more easily reduced than organic iron films to form small metal particles. Carbon nanotubes were even grown successfully on the organic nickel film without pre-reduction by heating with 700 W microwave in 550 torr 300 sccm 1:1 mixture of methane for 20 minutes. The lowest concentration film (0.1M) gave the best result of small diameter (30 nm) carbon nanotubes with less carbon soot.
The carbon nanotubes can grow not only upward but also downward to the Si substrate which pushed the layer of carbon nanotubes up from the substrate. A mechanism of the forming of carbon nanotubes is proposed to explain this observation.
Carbon nanotubes can grow successfully on titanium coated Si substrate. The carbon nanotubes grown on Ti thin film can be turned-on at an electric field as low as 1.5 V/μm due to the better electric conductivity of titanium.

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