六維運動量測裝置（Six Degree of Freedom Motion - Measurement Device，6D-MMD）為史都華平台機構之一應用，將六隻連接伸縮桿改成被動式精密量測球桿，當上下平台因CNC工具機驅動定位而產生相對運動，可從量測得六隻雙球桿桿長值的變化，計算出上下平台間6D相對運動的關係，即得出CNC工具機驅動定位之位置及轉動角。
本論文首先藉由誤差建模，說明六維運動量測裝置的量測值與誤差項之間的關係；接著，以最小平方法擬合計算出CNC工具機的運動軸線。隨後，建立標準量測程序，以取得必要的量測值；最後，根據理想量具與特定機構參數，以6D-MMD量測值推算出五軸CNC工具機中的各項聯結誤差項。
如此，便可以量測出CNC工具機每個線性軸與轉動軸之定位誤差。以三線性軸的CNC工具機為例，每軸六個定位誤差，再加上三軸彼此間的三個垂直度誤差，總共有21個誤差項可被量測。而在五軸同動工具機上，則增加轉動軸每軸6個定位誤差項，和5個軸線偏心與偏轉誤差項，以及床台誤差項等，經整併計算，六維運動量測裝置共可在一次架設量測中求得43項體積誤差，實為量具系統發展之創舉。
本論文最後以模擬五軸工具機各項誤差與運動的方式，以設定的各項誤差參數，實際製造出與六維運動量測系統量測值具有一樣意義的數據；隨後將數據代入數據處理程式中，直接算得各項聯結誤差與運動位置誤差，以驗證數據處理的理論與可行性，模擬結果證實能確實計算出各項設定的誤差項。

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