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研究生: 廖家成
Jia-Cheng Liao
論文名稱: 在五氧化二鉭與二氧化矽混合膜平面波導上施以熱極化之研究
Study of Thermal Poling on Mixed Ta2O5-SiO2 Planar Waveguide
指導教授: 趙煦
Shiuh Chao
口試委員:
學位類別: 碩士
Master
系所名稱: 電機資訊學院 - 光電工程研究所
Institute of Photonics Technologies
論文出版年: 2005
畢業學年度: 93
語文別: 中文
論文頁數: 81
中文關鍵詞: 五氧化二鉭二氧化矽熔融石英玻璃稜鏡耦合熱極化非線性
外文關鍵詞: Ta2O5, SiO2, fused quartz, prism coupler, thermal poling, nonlinear
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  • 本論文的研究方向主要是以熔融石英玻璃為基板,利用離子束濺鍍法製鍍Ta2O5-SiO2混合膜於基板表面,形成一層平面波導,然後利用光譜儀及macleod模擬軟體做波導分析,再以prism coupler量測波導中各個模態的有效折射係數,計算出波導的折射係數與厚度後,與macleod模擬軟體做相互驗證。
    利用本實驗室的熱極化(thermal poling)技術,針對不同的混合膜以及混合膜上覆蓋SiO2施以6kv、275oC、30min的熱極化,再透過Maker’s Fringe系統量測二階非線性強度。並持續觀察二階非線性強度隨時間的衰減現象,發現製鍍薄膜能有效抑制衰減。
    最後利用UV脈衝光抹除非線性強度,發現當Ta2O5的比例較高時,UV脈衝光不能抹除二階非線性強度。


    摘要 致謝辭 目錄 圖表目錄 第1章緒論………………………………………………………………1 1.1前言……………………………………………………………1 1.2研究動機及論文回顧…………………………………………2 第2章離子束濺鍍法之理論及實驗儀器………………………………6 2.1離子束濺射理論及工作原理…………………………………6 2.1.1 離子源結構……………………………………………7 2.1.2 輝光放電………………………………………………8 2.2離子束濺鍍系統………………………………………………9 第3章平面波導之光學特性分析………………………………………11 3.1光譜量測與分析……………………………………………11 3.1.1原理說明……………………………………………11 3.1.2量測結果……………………………………………12 3.1.3以Macleod 薄膜分析軟體計算n、k、d……………16 3.2橢圓偏光儀量測……………………………………………19 3.2.1原理說明……………………………………………19 3.2.2量測結果……………………………………………21 3.3反射式稜鏡耦合量測原理與系統架設……………………23 3.3.1原理說明……………………………………………23 3.3.2量測結果……………………………………………25 3.4結果與討論…………………………………………………29 第4章非線性效應特性分析…………………………………………33 4.1非線性光學的二階諧波產生理論…………………………33 4.2熱極化中心對稱結構晶體產生二階非線性之機制………35 4.3實驗流程及量測系統………………………………………39 4.3.1熱極化系統…………………………………………39 4.3.2 Maker Fringe量測系統……………………………41 4.3.3 UV脈衝光抹除非線性強度之實驗架設系統………42 4.4混合膜對二階非線性強度之探討…………………………44 4.4.1混合膜之二階非線性強度…………………………44 4.4.2混合膜上覆蓋SiO2之二階非線性強度……………46 4.4.3二階非線性強度的衰減現象………………………51 4.5 UV脈衝光抹除二階非線性強度……………………………55 4.5.1實驗結果………………………………………………55 第5章結論與未來展望………………………………………………62 5.1結果討論……………………………………………………62 5.2未來方向……………………………………………………63 附錄A Maker’s fringe圖…………………………………………65 附錄B稜鏡耦合之架設………………………………………………75

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