本文主要論述一電磁式微型發電器之設計，製作與量測，並藉由微型發電器之製作與量測，以研究作為穿載式微機電元件獨立電力來源之可行性。這個原型微發電器是以微機電技術在矽晶片上面製作懸浮的彈簧結構以及低電阻的線圈並配合小型硬磁鐵的使用，使得元件在振動的環境中，能讓線圈和磁鐵有相對運動讓線圈能切割磁鐵在空間中建立的磁力線，藉此在線圈上面形成感應電動勢，將振動動能轉換成電能。銅線圈是用厚膜光阻作模具以電鍍製程作成，厚度約為100um，線寬30μm，銅線間距20μm，總共20圈，電阻為2Ω。硬磁鐵的材料是釹鐵硼(NdFeB)，大小為2mm×2mm×1mm 。彈簧的材料為電鍍的鎳鐵合金，其懸浮結構利用微機電加工作成。整體的元件尺寸為6mm× 6mm× 1mm 。當這個微型發電器放在手上由手指頭輕輕彈動測試時，輸出的功率為0.32μW。當發電器放到一個振幅為50μm，振動頻率約為100Hz持續振動的機械振動器上面時，平均輸出功率為1.44μW。

This dissertation presents the study of a prototype vibration-induced micro power generator. A miniature micro power generator was designed ， fabricated and tested to investigate the feasibility of a wearable silicon micro power source. This prototype device consists of an energy-collecting electroplated copper coil of 100um thickness， a nickel-iron alloy (NiFe) suspension spring and a commercially available neodymium iron boron (NdFeB) magnet of dimension 2mm×2mm×1mm. The overall size of the micro power generator is 6mm×6mm×1mm. The average generated power is 0.32uW when the device is tapped gently with fingers. This tapping mimics the vibration when the device is worn on a person， and demonstrates the power generation feasibility by general human activity. An average power of 1.44uW was measured when the device was placed on a vibration bed excited with a sinusoidal signal of 50 μm amplitude.

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