本論文提出一個基於萃智理論為基礎的問題解決流程，運用於台灣的一個主 要晶圓代工公司，其半導體製程內的化學氣相沉積機台，以該機台的閘閥元件之故障案例做為本論文的研究標的。用重新設計閘閥機構之方式，來徹底解決此製程設備的失效問題。本研究成功地辨識出閘閥的關鍵性缺點及問題來源，並提出解決該問題的整合流程，以突破性的成果解決了閘閥元件老化的問題。
藉由此整合的流程，產生了多個解決此閘閥失效問題的方案。這當中與以往做法有所不同的是，絕大多數的工程師使用“+”的方法來解決問題，本研究所提出的削剪流程則使用“ -“的方法來解決問題，並產生巨幅的改善成果。此整合的系統性流程可以用來解決與製程設備有關的相似問題。
本研究之主要貢獻包括：1）建立一個整合 TRIZ 理論為基礎的削剪流程，用突破性的方法解決製程設備有關的問題。2）解決閘閥失效的問題，產生 95％閘閥元件成本降低、83.3％的元件數量減少、以及 99％的運作能源消耗降低；由於新的閘閥設計已完全跳脫出原始的故障模式，所以不會再有原本之設備失效的問題發生。本研究成果已經轉化為等待批准之專利。

This paper proposed a TRIZ-based integrated problem solving process to resolve a process-machine problem by re-designing the slit-valve of the processing machine. Based on a slit-valve failure of a chemical vapor deposition equipment in one of major Taiwanese foundry companies, the proposed problem solving process successfully identified the critical key disadvantages of the problem and solved the slit-valve failure with breakthrough results. A number of solutions were generated by the integrated process. Among them, trimming was used. Unlike the great majority of engineers use “+” method to resolve problem, the proposed trimming process used “-” method to solve problem with breakthrough results. The integrated systematic method can be used to address any process-machine related problems.
The main contributions of this paper include: 1) Establishing an integrated TRIZ-based trimming process to resolve process-machine related problems probable of breakthrough problem solving; 2) Solving the slit-valve problem with 83.3% component count reduction, 95% component cost reduction, 99% operational energy reduction, and completely designed-out the original failure mode. The results have been converted into a patent pending approval.

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