研究生: |
張豐願 Chang, Fong-Yuan |
---|---|
論文名稱: |
奈米實體層設計的良率及可繞度提昇 Nanometer Physical Design for Yield and Routability Enhancement |
指導教授: |
蔡仁松
Tsay, Ren-Song |
口試委員: |
蔡仁松
Tsay, Ren-Song 麥偉基 Mak, Wai-Kei 王廷基 Wang, Ting-Chi 陳宏明 Chen, Hung-Ming 陳泰蓁 Chen, Tai-Chen 李毅郎 Li, Yih-Lang |
學位類別: |
博士 Doctor |
系所名稱: |
電機資訊學院 - 資訊工程學系 Computer Science |
論文出版年: | 2013 |
畢業學年度: | 101 |
語文別: | 英文 |
論文頁數: | 79 |
中文關鍵詞: | 實體層設計 、繞線 、製程規則 |
外文關鍵詞: | Maze, Redundant Wire, Cut-Demand, Nanometer Design Rule |
相關次數: | 點閱:3 下載:0 |
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現今的積體電路奈米製程, 遇到了很多的限制. 為了提升良率,在積體電路實體層設計時, 需要考量到製程上所遇到的限制. 這些限制增加了實體層設計的困難度, 本篇論文針對這些限制提出了解決方案,能夠提升實體層設計的可繞度及製程良率. 本論文主要提出了三個技術. 第一的技技術是利用插入額外繞線來增加良率. 第二個技術是針對扁平的設計區塊, 提出方法來提昇繞線資源的利用率. 第三個技術是一個繞線時就能同時考量製程規則的最短路徑繞線方法. 經由實驗結果驗證, 這些方法可以有效的提升實體層設計的可繞度及製程的良率.
In today’s nanometer IC (Integrated Circuit) processing, foundries are facing increasing challenges from process limitations that seriously impact the chip yield and reliability. To overcome these limits, numerous design rules are imposed by foundries to be followed in IC design, especially in physical design. Besides design rules, we need to handle some other manufacturing defects, such as wire opens and shorts, for higher chip yield rate. Thus, in this thesis we first introduce two techniques to deal with the process limitations. The first one focuses on handling design rules in maze routing. We propose a shortest path algorithm under nanometer design rules, called MANA. With the algorithm, most rule violations are prevented in maze routing instead of being resolved in post-processing. The second technique is to increase the chip yield by inserting redundant wires to tolerate wire opens. After completing the design routing, usually there are still remaining routing resources that can be used for redundant wire insertion. The proposed insertion algorithm can accurately consider the wire open and short simultaneously and guarantee yield increasing for each insertion. Besides the above two routing innovations, we also introduce a useful technique for routing resources allocation to improve routability. In current SoC (System on Chip), the aspect ratios of blocks in designs may vary much and the required resources in horizontal and vertical directions are different. Thus, we introduce an approach to allocate and consolidate routing resources considering directed routing resource demands, which can greatly increase routability especially for designs with thin areas. The goal for our proposed methods is to achieve high routability and chip yield for nanometer SoC designs.
[1] Alexander, Volkov. "Impact of Manufacturing on Routing Methodology at 32/22 nm," ISPD, pp.139-140, 2011.
[2] Alpert, C. J., G. E. Tellez. "The Importance of Routing Congestion Analysis," DAC, 2010.
[3] Bakoglu, H. B.. "Circuits, Interconnections, and Packaging for VLSI," Addison-Wesley, 1990.
[4] Balachandran, S. and D. Bhatia. "A-Priori Wirelength and Interconnect Estimation Based on Circuit Characteristic, " SLIP, pp. 77-84, 2003.
[5] Bickford, J., J. Hibbeler, M. Buhler, J. Koehl, D. Muller, S. Peyer and C. Schulte, "Yield Improvement by Local Wiring Redundancy," ASPDAC, pp. 468-473, 2009.
[6] Bodapati, S. and F. Najm. "Prelayout Estimation of Individual Wire Lengths," IEEE Transactions on VLSI, pp. 943 – 958, 2001.
[7] C3. https://docs.google.com/open?id=0BzieVrl9EJV6OGRkZDcyNWYtODI
4MC00NTNkLTk5NTEtMDA1NzcyMzYyY2Vl
[8] Chao, K. Y., T. C. Wang, and K.Y. Lee, "Post-Routing Redundant Via Insertion and Line End," ICCAD, pp. 633-640, 2006.
[9] Cho, M. and D. Z. Pan. "BoxRouter: a new global router based on box expansion and progressive ILP," DAC, pp. 373-378, 2006.
[10] Cho, M., D. Z. Pan, H. Xiang, and R. Puri. "Wire Density Driven Global Routing for CMP Variation and Timing," ICCAD, pp. 487-492, 2006.
[11] Cho, M., H. Xiang, R. Puri, and D. Z. Pan, "TROY: Track Router with Yield driven Wire Planning," DAC, pp. 55-58, 2007.
[12] Cho, M., J. Mitra, and D. Z. Pan. "Manufacturability Aware Routing," in: Handbook of Algorithms for VLSI Physical Design Automation, CRC Press, 2009.
[13] Cho, M., J. Mitra, and D. Z. Pan. "TROY: Track Router with Yield-Driven Wire Planning," DAC, pp. 55-58, 2007.
[14] Chong, P. and R. K. Brayton. "Estimating and Optimizing Routing Utilization in DSM Design," In International Workshop on System-Level Interconnect Prediction, ACM, 1999.
[15] Christie, P. and D. Stroobandt. "The Interpretation and Application of Rent's Rule," IEEE Transactions on VLSI Systems, pp. 639-648, 2000.
[16] Danny, Rittman. "Nanometer DFM – The Tip of the Ice," http://www.tayden.com/publications/Nanometer%20DFM.pdf.
[17] DRouter. http://www.springsoft.com/news-events/news/product-news/ laker-placeandroute-03152010
[18] Fathi, B., L. Behjat and L. M. Rakai. "A pre-placement net length estimation technique for mixed-size circuits," SLIP, pp.ages 45-52, 2009.
[19] Gester, M., D. Muller, T. Nieberg, C. Panten, C. Schulte, J. Vygen, "Algorithms and Data Structures for Fast and Good VLSI Routing," DAC, pp.459-464, 2012.
[20] Gyvez de, J. P., "Yield modeling and BEOL fundamentals," SLIP, pp. 135-163, 2001.
[21] Digital-Router. http://www.springsoft.com/products/custom-design-and-layout/ digital-router
[22] Hart, P. E., N. J. Nilsson and B. Raphael, "A Formal Basis for the Heuristic Determination of Minimum Cost Paths," IEEE Trans. on Systems Science and Cybernetics, pp.100–107, 1968.
[23] Hsu, D. F., Xiao-Dong Hu, and Guo-Hui Lin, "On Minimum-Weight k-Edge Connected steiner Networks on Metric Spaces," Graphs and Combinatorics, pp. 275-284, 2000.
[24] Hu, C. K., "Effects of overlayers on electromigration reliability improvement for Cu/Low-k," IRPS, pp. 222-228, 2004.
[25] Huang, L. and D.F. Wong. "Optical Proximity Correction (OPC)-Friendly Maze Routing," DAC, pp. 186-191, 2004.
[26] Jiang, Z. W., B.-Y. Su, and Y.-W. Chang. "Routability-Driven Analytical Placement by Net Overlapping Removal for Large-Scale Mixed-Size Designs," DAC, pp.167-172, 2008.
[27] Jothi, R., B. Raghavachari, and S. Varadarajan, "A 5/4-approximation algorithm for minimum 2-edge-connectivity," SIGACT, pp. 725 – 734, 2003.
[28] Kahng, A. B., B. Liu, and I. I. Mandoiu. "Non-tree Routing for Reliability and Yield Improvement," ICCAD, pp. 260-266, 2002.
[29] Kahug, A. B., S. Mantik and D. Stroobandt. "Requirements for Models of Achievable Routing," ISPD, pp.4-11, 2000.
[30] Landman, B. and R. Russo. "On A Pin Versus Block Relationship for Partitions of Logic Graphs." IEEE Transactions on Computers, pp. 1469–1479, 1971.
[31] Lee, C. Y., "An Algorithm for Path Connections and Its Applications," IRE Transactions on Electronic Computers, pp. 346–365, 1961.
[32] Lee, D. T., C. D. Yang, C. K. Wong, “Rectilinear paths among rectilinear obstacles.” Discrete Applied Mathematics, pp.185–215, 1996.
[33] Lee, T. H. and T. C. Wang. "Robust Layer Assignment for Via Optimization in Multi-layer Global Routing," ISPD, pp. 159-166, 2009.
[34] LEF/DEF reference manual, Version 5.7.
[35] Lei, C. K., P. Y. Chiang and Y. M. Lee, "Post-Routing Redundant Via Insertion with Wire Spreading Capability," ASPDAC, pp. 468-473, 2009.
[36] Li, Y. L., H. Y. Chen, and C. T. Lin, "NEMO: A New Implicit-Connection-Graph-Based Gridless Router With Multilayer Planes and Pseudo Tile Propagation.” IEEE Trans. Computer-Aided Design, pp.705–718, 2007.
[37] Lou, J., S. Krishnamoorthy and H. S. Sheng. "Estimating Routing Congestion using Probabilistic Analysis," ISPD, pp.112-117, 2001.
[38] Li, C., M. Xie, C. K. Koh, J. Cong, and P. H. Madden. "Routability-driven placement and white space allocation," ICCAD, pp. 394–401, 2004.
[39] Margarino, A., A. Romano, A. D. Gloria, F. Curatelli, and P. Antognetti,"A tile-expansion router, " IEEE Trans. Computer-Aided Design, pp. 507–517, 1987.
[40] Maly, W., “Modeling of Lithography Related Yield Losses for CAD of VLSI Circuits,” IEEE Trans. on Computer-Aided Design of Integrated Circuits and Systems, pp. 166-177, 1985.
[41] McCoy, B. A., and G. Robins, "Non-tree routing," IEEE Trans. on Computer-Aided Design of Integrated Circuits and Systems, pp. 790-784, 1995.
[42] McPherson, J. W., "Reliability Challenges for 45nm and Beyond," Proceedings of the 43rd annual conference on Design automation, pp. 176-181, 2006.
[43] Mitra, J., P. Yu, and D. Z. Pan. "RADAR: RET-Aware Detailed Routing Using Fast Lithography Simulations," DAC, pp. 369–372, 2005.
[44] Muller, D.. "Optimizing Yield in Global Routing," ICCAD, pp. 480-486, 2006.
[45] Nassif, S. R. and K. J. Nowka. "Physical Design Challenges Beyond the 22 nm Node," ISPD, pp. 13-14, 2010.
[46] Nieberg, T., "Gridless Pin Access in Detailed Routing," DAC, pp. 170-175, 2011.
[47] Pan, D. Z., P. Yu, M. Cho, A. Ramalingam, K. Kim, A. Rajaram, and S. X. Shi. "Design for Manufacturing Meets Advanced Process Control: A Survey," Journal of Process Control, pp. 975–984, 2008.
[48] Pan, M. and C. Chu. "FastRoute: A Step to Integrate Global Routing into Placement, " ICCAD, pp.464-471, 2006.
[49] Panitz, P., M. Olbrich, E. Barke, and J. Koehl, "Robust Wiring Networks for DfY Considering Timing Constraints," GLSVLSI, pp. 43-48, 2007.
[50] Papadopoulou, E. and D. T. Lee. "Critical Area Computation via Voronoi Diagrams," IEEE Trans. on Computer-Aided Design of Integrated Circuits and Systems, pp. 463– 474, 1999.
[51] Rizzo, O., and H. Melzner, "Concurrent Wire Spreading, Widening, and Filling," ASPDAC, pp. 350-353, 2007.
[52] Roy, J. A., N. Viswanathan, G.-J. Nam, C. J. Alpert and I. L. Markov. "CRISP: Congestion Reduction by Iterated Spreading during Placement, " ICCAD, pp. 357-362, 2009.
[53] Sato, M., J. Sakanaka, and T. Ohtsuki, "A fast line-search method based on a tile plane," Int. Conf Circuits Systems, pp. 588–591, 1987.
[54] Sait, S. M. and H. Youssef. "VLSI Physical Design Automation: Theory and Practice, " Baker & Taylor Books, 1999.
[55] Scheffer, L., L. Lavagno and G. Martin. "EDA for IC Implementation, Circuit Design, and Process Technology," CRC Process, Taylor & Francis Group, 2006.
[56] Schiele, W., T. Kruger, K. Just, and F. Kirsch, "A gridless router for industrial design rules." DAC, pp. 24-28, 1990.
[57] Sechen, C.. "Average Interconnection Length Estimation for Random and Optimized Placements," ICCAD, pp. 190-193, 1987.
[58] TSMC Document No. T-N65-CL-DR001.
[59] TSMC Document No. T-N45-CL-DR001.
[60] TSMC Document No. T-N28-CL-DR001.
[61]U1. http://docs.google.com/leaf?id=0BzieVrl9EJV6YjlhODUyNmYtYjk5Ny
00 MTg4LWFjYTItZDc4YmQ4YmYxM2Iz&hl=en
[62] Wang, M., X. Yang, M. Sarrafzadeh. "Dragon2000: standard-cell placement tool for large industry circuits," ICCAD, pp. 260-263, 2000.
[63] Zhang, Y. and C. Chu. "CROP: Fast and Effective Congestion Refinement of Placement," ICCAD, pp. 344-350, 2009.
[64] Zheng, S., J. S. Lim, and S. Iyengar, “Finding obstacle-avoiding shortest paths using implicit connection graphs,” IEEE Trans. Computer-Aided Design, pp. 103–110, 1996.
[65] Zhou, H.. "Efficient Steiner tree construction based on spanning graphs," ISPD, pp. 152-157, 2003.