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研究生: 范振豊
Fan, Cheng-Li
論文名稱: 鐵酸鉍鐵電薄膜的電性及光伏效應
Electric property and Photovoltaic behavior of ferroelectric bismuth ferrite thin films
指導教授: 吳振名
Wu, Jenn-Ming
口試委員: 陳世偉
李奕賢
學位類別: 碩士
Master
系所名稱: 工學院 - 材料科學工程學系
Materials Science and Engineering
論文出版年: 2012
畢業學年度: 100
語文別: 中文
論文頁數: 107
中文關鍵詞: 鐵酸鉍光伏效應能隙鐵電
外文關鍵詞: BFO, photovoltaic, band gap, ferroelectric
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  • 本實驗主要在探討鐵酸鉍(BiFeO3,BFO)薄膜在不同退火溫度、退火氣氛、緩衝層以及不同摻雜濃度下所表現出來的光伏效應,藉由各項儀器來觀察鐵酸鉍薄膜在不同情況下所表現出來的差異性,再藉由分析這些差異性來推測影響光伏效應的可能機制與原因。
    本實驗的BFO薄膜以及導電緩衝層都是利用溶膠凝膠法(sol-gel method)在白金基板上鍍製。首先,先在白金基板上鍍上不同的導電緩衝層,分別為鎳酸鑭(LaNiO3,LNO)以及氧化鉍(Bi2O3),接著將BFO薄膜或摻雜釔(Y)的BYFO薄膜分別鍍在具有不同緩衝層的基板上,分別為:Pt、LNO/Pt、Bi2O3/Pt。最後,這些BFO薄膜會分別經過不同溫度或不同氣氛的退火處理。
    分析的儀器分別是利用場發射電子顯微鏡來觀察表面形貌與晶粒大小,X光繞射儀來分析薄膜的結晶行為,壓電力顯微鏡觀察BFO薄膜鐵電電域的排列情況,化學分析電子能譜儀進行薄膜表面化學分析,紫外光-可見光光譜儀量測薄膜的光學性質,鐵電量測儀量測電滯曲線,太陽光模擬系統量測光伏效應,半導體分析參數儀量測漏電流行為,LCR測試儀量測在不同頻率下的介電常數與散逸因子。
    實驗發現,鐵酸鉍薄膜的晶粒大小、氧空缺的出現以及結晶性的差異都會對光伏效應產生影響。晶粒大小會影響電子電洞對的擴散距離,氧空缺的出現會形成缺陷能階,促使電子電洞對傾向複合,這兩個因素都不利閉路電流的產生。較好的結晶性會有較好的電導率,不利開路電壓的提升。此外,實驗發現,透過摻雜釔可以大幅提升BFO薄膜在照光下的閉路電流,也可稍稍提升開路電壓,推測主要原因與其光學性質的改變有關。但若過量摻雜釔反而會使光伏效應減弱,推測主要原因與摻雜後薄膜結構的轉變有關。由於適量摻雜釔可以提升閉路電流進而提升開路電壓,LNO緩衝層能夠降低BFO薄膜的缺陷含量,因此將適量摻雜釔的BFO薄膜鍍在LNO緩衝層上可以同時大幅提升閉路電流與開路電壓,其光伏效應的表現是本實驗中表現最好的一組。透過其他性質的量測,發現BFO薄膜光伏效應的強弱與本實驗中所進行的電滯曲線、介電常數隨頻率變化、散逸因子隨頻率變化與漏電流量測,並無觀察到有任何明顯直接的關聯。


    摘要 I 致謝 III 目錄 V 圖目錄 X 表目錄 XIV 第一章 緒論 1 1.1前言 1 1.2研究動機 1 第二章 文獻回顧 3 2.1鐵酸鉍(BFO)的特性 3 2.1.1晶體結構 3 2.1.2鐵電性質 4 2.1.3 鐵電電域與域壁(domain and domain wall) 6 2.1.4壓電特性 7 2.1.5能隙 8 2.1.6光伏性質 8 2.2介電性質 10 2.2.1介電性質與鐵電性質的關係 10 2.2.2介電常數與逸散因子 12 2.2.3 介電崩潰 13 2.2.4漏電流機制 14 2.3 化學溶液沉積法 16 第三章 實驗方法 26 3.1試片的製備 26 3.1.1基板的準備 26 3.1.2 BiFeO3(BFO)與Bi1-xYxFeO3(BYFO)溶液的製備 29 3.1.3薄膜的鍍製與退火處理 30 3.1.4 上電極的鍍製 31 3.2 實驗量測與儀器 32 3.2.1 X光繞射儀 32 3.2.2場發射掃描式電子顯微鏡 32 3.2.3壓電力顯微鏡 33 3.2.4介電常數與散逸因子 33 3.2.6 電滯曲線 34 3.2.7 化學鍵結分析 34 3.2.8 薄膜光學性質量測 35 3.2.9 光伏性質量測 35 第四章 結果與討論 40 4.1 BiFeO3/Pt之薄膜性質 40 4.1.1晶體結構 40 4.1.2微觀結構 41 4.1.3化學鍵結 41 4.1.4介電常數與散逸因子 42 4.1.5漏電流量測 43 4.1.6電滯曲線 43 4.1.7光伏性質 44 4.2BiFeO3 /Bi2O3 /Pt之薄膜性質 44 4.2.1晶體結構 45 4.2.2微觀結構 46 4.2.3化學鍵結 47 4.2.4介電常數與散逸因子 47 4.2.5漏電流量測 47 4.2.6電滯曲線 48 4.2.7光伏性質 48 4.3 BiFeO3/LNO/Pt之薄膜性質 49 4.3.1晶體結構 49 4.3.2微觀結構 50 4.3.3化學鍵結 50 4.3.4介電常數與散逸因子 51 4.3.5漏電流量測 51 4.3.6電滯曲線 52 4.3.7光伏性質 52 4.4 Bi1-xYxFeO3/Pt之薄膜性質 52 4.4.1晶體結構 53 4.4.2微觀結構 53 4.4.3化學鍵結 54 4.4.4介電常數與散逸因子 54 4.4.5漏電流量測 54 4.4.6電滯曲線 55 4.4.7 光學性質 55 4.4.8光伏性質 57 4.5 影響閉路電流機制的探討 58 4.6 影響開路電壓機制的探討 60 4.7緩衝層與氮氣氛退火對BFO薄膜所造成的影響 62 4.8摻雜釔對BFO薄膜所造成的影響 63 4.9利用緩衝層及摻雜法提升BFO薄膜的光伏效應-Bi0.95Y0.05FeO3 /LNO/Pt 64 第五章 總結 99 第六章 參考文獻 103

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