奈米碳管具有相當多優秀的物理與化學特性，包括很大的剛性、密度僅為鋼材的六分之一、最高的導熱係數以及能比金屬承受更多的電流密度等，因此本文主要目標正是要將奈米碳管整合進微機電系統裡，以期奈米碳管能增進微機電系統的性能與能力。
本研究主要包含(a)準直性奈米碳管之成長、(b)整合三維奈米碳管圖案於微機電結構、(c)奈米碳管高分子複合薄膜電熱致動器、(d)可撓式奈米碳管場發射元件。準直性奈米碳管成長是整個研究的核心項目，本文藉由此核心研究進ㄧ步的將奈米碳管應用整合進微機電系統。經由量測與分析顯示，本文藉由三維微細加工製程平台，成功的於三維微機電結構上定義出三維的奈米碳管圖案。複合薄膜致動器藉由殘餘應力的影響大小可分為出平面以及同平面致動器，藉由奈米碳管與奈米碳管間電子的傳導，使元件能因焦耳熱而於很低的輸入電流下有大位移的致動。以奈米碳管高分子複合薄膜為基材的可撓式奈米碳管場發射元件，其結構如同ㄧ複合物組成的盒子內裝滿準直性的奈米碳管，且能於相當低的臨界電場下進行電子的場發射。

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