微機電系統是一種新型的加工方式，使用半導體製程來製作微小的機械系統在矽晶片上。CMOS MEMS便是使用標準化的半導體製程技術來製作微機電元件的微加工技術，能輕易地和感測、控制電路整合在同一塊晶片上，成為一個完整的微機電系統。
本研究中提出三種不同致動方式在微光學面鏡上的應用，包含由垂直式梳狀致動器(Vertical comb driver)所提供的靜電驅動力、電熱式熱致動器(Thermal beam actuator)和外部磁場及內部線圈感應所產生的勞倫茲力，將這些不同的致動方式整合在CMOS MEMS的晶片中，可使面鏡做多軸向的運動。元件製作由TSMC 0.35 2P4M 標準製程和兩道蝕刻步驟的後製程所完成。再搭配後續的量測，得到元件完整的動態、靜態特性。本研究從元件設計、特性模擬、CMOS後製程和最後量測過程都有詳細記載，提供一個參考依據，期望對未來相關領域的研究或應用上有所幫助。

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