本研究評比各家半導體廠的各項績效指標。評估的對象包括新竹科學園區的9家半導體廠，本研究深入黃光區，分析各家半導體廠的黃光區設備指標，藉以提供參予的廠商作為機台選擇的參考。
本年度的貢獻包括有1) 全廠及黃光區的績效指標標竿比較 2) 找出了 4個新的績效指標驅動因子3)建立兩組績效指標回歸模型4) 全廠、黃光區以及黃光機台作投入產出效率比較 5) 黃光區機台的成本效益分析6) 黃光機台故障原因統計7) 黃光機台差異性分析。分析過程中利用各種不同統計手法針對所取得的資料作有效的利用，以及資料包絡分析法(Ｄata Ｅnvelope Ａanalysis)軟體來評估各廠的投入產出效率以及相關分析找出黃光區及全廠的改善驅動因子 ，並分析黃光區的機台根據其效能做差異性分析以供半導體廠做參考。

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This research benchmarked nine semiconductor manufacturing plants in Taiwan. Performance and determinant indices at fab level, photolithographic module and machine levels are analyzed. Contributions of the work include: 1) direct benchmarking of major indices, 2) identification of four additional fab improvement drivers over the previous work by Sheu and Wu, 3) regression model for two performance indices, 4) analysis of input/output technical efficiencies for the participating fabs at fab level, module level, and photolithographic machine level, 5) benefit/cost analysis for various models of steppers/scanners, 6) statistics of machine failure causes, and 7) enhancement of performance index model
ABSTRACT 3

目錄圖目錄 4

圖目錄 4

1.1 研究背景與動機 4

1.2研究目的 4

1.3相關研究計劃 4

第二章、文獻探討 4

2.1 設備管理實務 4

2.1.1 標竿管理 4

2.1.2 黃光區設備管理實務探討 4

2.2 OVERALL EQUIPMENT EFFICIENCY(OEE)在設備管理上的應用 4

2.2.1 Resist Processing Equipment的介紹 4

2.2.2 Overall Equipment Effectiveness (OEE) 4

2.2.3 Rate of Quality 4

2.2.4 Availability 4

2.2.5 Performance Efficiency 4

2.2.6 Overhead reduction 4

2.2.7 結論 4

2.3 COST OF OWNERSHIP(COO) REVIEW 4

2.4 DUNCAN多重全距檢定手法 4

第三章、研究方法 4

3.1計劃重點 4

3.2研究對象與範圍 4

3.3 問卷設計原則 4

3.4 資料保密 4

3.5 研究手法及工具 4

3.5.1 研究手法 4

3.5.2 各分析手法所用的工具 4

3.5 研究流程 4

第四章 重要評比指標說明 4

4.1重要及評比指標說明 4

4.1.1全廠性績效指標 4

4.1.2黃光區績效指標 4

4.1.3 黃光機台關鍵績效指標 4

4.2 關鍵績效指標解釋表 4

第五章 設備管理指標模型分析結果 4

5.1 指標標竿(DIRECT BENCHMARKING) 4

5.1.1 全廠性觀察—含前兩年資料 4

5.1.2 黃光區指標比較 4

5.1.3機台關鍵績效指標表現評比 4

5.2 驅動因子分析 4

5.2.1 全廠性內部驅動因子分析結果 4

5.2.2 黃光區驅動因子分析結果 4

5.2.3 全廠及黃光驅動因子分析結果 4

5.2.4 去年及今年驅動因子分析綜合比較及建議 4

5.3 驅動因子回歸分析 4

5.3.1 Fab Yield v.s. Target Hit Rate by Order 4

5.3.2 Cluster Cycle Time v.s. First Pass Yield 4

5.4 投入產出相對效率分析 4

5.4.1投入產出的效率分析 4

5.4.2黃光機台投入產出效率分析 4

5.5 黃光區機台成本效益分析 4

5.5.1 不同廠牌以及機型的Performance比較 4

5.5.2 不同廠牌機台間各績效指標的差異性分析 4

5.6 黃光機台故障原因分析 4

第六章 結論與建議 4

6.1 綜合結論 4

6.2 改善建議 4

6.3 後續研究方向 4

附錄A、2000年設備管理問卷 4

附錄B、設備管理指標總表 4

參考文獻 4

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