研究生: |
鄭峰銓 Cheng, Feng-Chuan |
---|---|
論文名稱: |
應用田口方法達成化學機械研磨用之濾芯外殼接合強度參數最佳化 Application of Taguchi Methods to Optimize the Parameter of Housing Welding Strength of CMP Filter |
指導教授: |
陳建良
Chen, James C. |
口試委員: |
陳盈彥
Chen, Yin-Yann 陳子立 Chen, Tzu-Li |
學位類別: |
碩士 Master |
系所名稱: |
工學院 - 工業工程與工程管理學系碩士在職專班 Industrial Engineering and Engineering Management |
論文出版年: | 2020 |
畢業學年度: | 108 |
語文別: | 中文 |
論文頁數: | 51 |
中文關鍵詞: | 田口方法 、直交表 、化學機械研磨 、熱熔 |
外文關鍵詞: | Taguchi methods, orthogonal array, Chemical Mechanical Planarization, Heat Staking |
相關次數: | 點閱:4 下載:0 |
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本論文研究應用田口方法於半導體化學機械研磨製程用之濾芯外殼的接合強度最佳化。透過專業工程人員的工作經驗與判斷,並參考原廠設備技師之建議,選擇在使用熱熔方法來接合濾芯外殼的機械設備中,選出影響濾芯外殼接合強度之參數項目。接著透過分析過程中的各項控制因子(Control Factors),來找出哪些重要參數為主要影響濾芯外殼之接合強度。透過分析出來的結果,進行改善,大幅降低因接合強度不足而造成成品報廢之數量。
透過田口的實驗設計,將選擇出來的各控制因子適當地放置在適合此實驗的直交表中,並實際進行濾芯外殼接合實驗測試,得到各水準組合下的接合強度數據,進行分析歸納後,找出顯著影響接合強度之因子,以及最佳化之參數水準組合。實驗確認後,將田口方法實際應用於工廠生產線上,結果顯示田口方法能夠有效提升良率,進而降低生產成本。
This thesis is about the application of the Taguchi method to optimize the bonding strength of the filter shell used in the semiconductor CMP process. Through the work experience and judgment from professional engineering staff and with the advice of equipment technicians, mechanical equipment is used with the heat staking method to join the filter housing, and select the parameters that affect the joint strength of the filter housing. Then through the analysis of control factors to find which important parameters mainly affect the joint strength of the filter shell. Through analysis of the results, improvements are made to reduce the number of finished products scrapped due to insufficient joint strength.
Through experimental design of Taguchi, the selected control factors are appropriately placed in the orthogonal array suitable for this experiment, and the actual test of the filter shell joint test is carried out to obtain the joint strength data under each level combination. After analysis and summarization, the Factors that significantly affect the joint strength, as well as optimized parameter level combinations are found. After the experiment was confirmed, the Taguchi method was practically applied to the factory production line, and results showed that the Taguchi method could effectively improve the yield, thereby reducing production costs.
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