摘要
六維運動量測裝置(six-DOFs Motion Measurement Device, MMD)係利用平行連桿機構建立的運動量測裝置；此裝置能夠在同一參考座標系內，量出刀具相對於工件運動之六維運動關係及幾何誤差，及各種連續與非連續運動的動態軌跡。
本論文以史都華平行機構之六維運動量測裝置為標的，研究可伸縮量測桿的熱誤差補償方法，及模擬MMD可伸縮量測桿桿長熱誤差補償前後的量測誤差飄移情況。接著，本論文針對五軸工具機各線性驅動軸之垂直度誤差進行量測與補償，再以雙球桿循圓量測儀驗證其補償效果。

Abstract
The six-DOFs motion measurement device (MMD) is based on the Stewart parallel mechanism. This device is capable of measuring the motion between the tool and the workpiece, and geometric errors of CNC machine tools can be measured in one single reference coordinate system. A variety of test paths with continuous and non-continuous feeds can also be measured by the MMD.
The goal of this thesis is to investigate the thermal compensation method for the telescopic double ball bar and to simulate the drift errors before/after the thermal compensation. This thesis also focuses on the measurement and compensation of the squareness errors of the linear axes. The achieved accuracy improvement of the compensation is verified by the measurement results of double ball bar.

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