本研究之目的為開發以微機電壓電式加速度計做為感測器之振動感測模組，而此振動感測模組將應用於馬達振動監測系統，達到監測馬達健康狀態之目的。此模組包含：(i)以PZT on SOI製程製造之加速度計元件，共有六種主要設計，而每種設計下又有三種分別對應到共振頻率5 kHz、10 kHz、20 kHz之子設計，根據不同的頻寬需求，可以選擇不同的元件來進行使用；(ii)加速度計讀取電路之印刷電路板設計，此電路之增益約為100倍，低頻轉角位於56.1 Hz，而高頻轉角位於148.2 kHz；(iii)金屬外殼，元件打線至PCB子板後，透過插拔方式連接至含有讀取電路之PCB母版，由螺絲將電路板和金屬外殼鎖至測試平台，組成測試用之振動感測模組。本論文中包含：(i)壓電式加速度計之設計、有限元素分析法模擬、元件製作流程、LDV量測；(ii)讀取電路之架構、LTspice模擬、印刷電路板佈局與製作、PCB之量測；(iii)振動感測模組之設計與量測。本論文中之實驗選用六個共振頻率為5 kHz或10 kHz之元件，裝置於振動感測模組中，經量測得到共振頻率5 kHz與10 kHz元件之性能表現分別為靈敏度19.11 mV/g、解析度2.57 mg/√Hz，及靈敏度8.12 mV/g、解析度5.85 mg/√Hz。

The purpose of this work is to develop a vibration sensing module using a MEMS piezoelectric accelerometer as a sensor. The vibration sensing module will be applied to the motor vibration monitoring system to achieve the purpose of monitoring the health of the motor. This module includes: (i) MEMS piezoelectric accelerometer device fabricated by PZT on SOI process. There are six main designs, and each has three sub-designs that correspond to resonant frequencies of 5 kHz, 10 kHz, and 20 kHz.
Depending on the bandwidth requirements, different device can be selected for use. (ii) Printed circuit board design for accelerometer readout circuit. The gain of this circuit is about 100, the low corner frequency is at 56.1 Hz and the high corner frequency is at 148.2 kHz. (iii) Metal casing. After the device is wire-bonded to the daughter board, it is connected to the PCB containing the readout circuit by plugging and unplugging. Finally, the PCB and the metal casing are locked by screws to the test platform to form a vibration sensing module for testing. In this thesis shows: (i) Designs and finite element method simulations of MEMS piezoelectric accelerometers, fabrication process flow of the device and the LDV measurement of the device. (ii) Readout circuit architecture, LTspice simulation of the circuit, printed circuit board layout and fabrication, and the measurement of the PCB. (iii) Design and measurement of vibration sensing module. The experiments in this thesis use six devices with a resonant frequency of 5 kHz or 10 kHz, which are installed in the vibration sensing module. The best measured performance of the resonant frequency 5 kHz device is sensitivity of 19.11 mV/g and resolution of 2.57 mg/√Hz, and 10 kHz devices is sensitivity of 8.12 mV/g and resolution 5.85 mg/√Hz.

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