Use Laser Patterning to Construct Honeycomb Structure Solar Cell

簡易檢索 / 詳目顯示

回結果列表

研究生：	施宜廷 Shih, Yi-Ting
論文名稱：	Use Laser Patterning to Construct Honeycomb Structure Solar Cell 利用雷射對矽晶片進行表面粗糙化形成蜂巢狀太陽能電池
指導教授：	黃惠良 Hwang, Huey-Liang
口試委員:
學位類別：	碩士 Master
系所名稱：	電機資訊學院 - 電子工程研究所 Institute of Electronics Engineering
論文出版年：	2010
畢業學年度：	98
語文別：	英文
論文頁數：	69
中文關鍵詞：	太陽能電池
相關次數：	點閱：2 下載：0
分享至:	分享至facebook 分享至twitter

查詢本校圖書館目錄查詢臺灣博碩士論文知識加值系統勘誤回報

在本論文中,先用PECVD在p-type 單晶矽基板上長一層SiOx mask,再利用Nd-YVO4之綠光雷射在單晶矽基板上打洞,最後經過濕式等向性蝕刻而形成蜂巢狀結構.

我們總共設計三次實驗,在第一次實驗中,我們發現經過雷射打洞後所作出的元件串聯電阻很大,經過SEM的分析後,發現上電極的表面結構經過雷射與濕式蝕刻後並不平滑而產生金屬不連續進而導致Fill factor (F.F)只有0.232;第二次實驗當中我們設計另外一種雷射打洞的圖形,解決了金屬不連續的問題,將Fill factor (F.F)提高到0.749,不過Voc值最高只有0.538(Volt),經過EQE分析後在波長300~800nm之間,電子電洞復合速度很快,推測這是因為雷射所造成晶格錯排產生SRH復合效應,第三次實驗我們增加了SiOx的厚度以及濕式蝕刻的深度來減少雷射打洞所造成晶格的錯排,經過SEM分析後,表面結構比之前平滑許多,EQE分析也顯示出復合速度減緩,最後元件參數:Jsc提升到34.51(mA/cm2),Voc提升到0.572(Volt),效率也來到14.9(%).

Contents

List of Figures
List of Tables                                           Page
Chapter 1 Introduction………………………….........................01
1.1 Background and
Motivation…………………….........................01
1.2 Types of Solar Cell……………………………….............................03
1-3 Introduction of the Solar Cell………………....................................04
1-4 Basic Theory of the Solar Cell...........................................................06
1-5 The Physical of the Solar Cell…………………................................07
Reference………………………………………………............11
Chapter 2 Solar Cell Operation…………………….............................12
2.1 The Current and Voltage Characteristic……….............................….12
2.2 Short Circuit Current…………………………….............................13
2.3 Open Circuit Voltage…………………………….............................14
2.3 Fill Factor…………………………………….......................16
2.4 Efficiency……………………………………....................17
2.5 Electrical Losses…………………………………..........................17
Reference……………………………………………...............20
Chapter 3 Introduction to the experimental equipments……………………………………………..............21
3.1 Major Equipments for Experiment……………….............................21
3.1.1 High Temperature Diffusion/Forming Gases
Annealing Furnace…………………………............................21
3.1.2 Metallization……………………………….....................22
3.1.3 Plasma Enhanced Chemical Vapor Deposition
     (PECVD)…………………………………….........................24
3.1.4 RF Sputter System………………………….............................25
3.1.5 Diode Pumped Solid State (DPSS) laser……...........................27
3.2 Measurement Equipments…………………………..........................28
3.2.1High-resolution Scanning Electron Microscope
    (SEM)………………………………………...........................29
3.2.2 Spreading Resistance Profiling (SRP)………..........................30
3.2.3 Quantum Efficiency (QE)…………………............................................31
3.2.4 Solar Simulator……………………………….........................32
Reference……………………………………………...............34
Chapter 4 Experimental process and results………............................................35
4.1 Surface Texture Treatment………………………..............................35
   4.1.1 Wafer Selection……………………………..........................35
   4.1.2 The Process of Surface Texture Treatment…............................35
   4.1.3 Optical Properties of Laser Texture…………...........................37
   4.1.4 SEM Characteristics of Laser Texture………...........................40
4.2 Experiment1……………………………………...........….45
   4.2.1 The Manufacturing Process of Solar Cell…..............................45
4.2.2 The Result of Phosphorus Diffusion Process...........................46
4.2.3 The light current-voltage (I-V) Characteristics
     of the Experiment 1…………………………..........................47
4.2.4 Metal Discontinuity Caused by
Laser Ablation………………………………..........................48
4.3 Experiment 2………………………………………..........................52
4.3.1 To Improve Metal contact in Porous Silicon.............................52
   4.3.2 The Manufacturing Process of Solar Cell…..............................53
   4.3.3 The light I-V Characteristics of the
Experiment 2…………………………….…...........................55
4.3.4 Laser Induced Defect-Dislocation line and
     Dislocation Clusters……………………............................……61
   4.4.1 The Manufacturing Process of Solar Cell…..............................61
   4.4.2 SEM Characteristics of Laser Texture………...........................62
   4.4.3 The analysis of EQE………………………..............................64
4.4.4 The Light I-V Characteristics of the Experiment
        3 and Conclusions………………………….........................65
4.5 Conclusions……………………………………….................66
Reference……………………………………………...............68


List of Figures

Figure 1-1 World Primary Energy Demand……….................................02
Figure 1-2 The global forecasted numbers of all types of
         solar cell installations from 2002 to 2030…..........................03
Figure 1-3 Major types of solar cells………...........................................04
Figure 1-4 Complexity of manufacturing……………............................05
Figure 1-5 The electricity generation principle of solar
         cell……………………………………….......................07
Figure 1-6 The way to estimate the air mass………...............................09
Figure 1-7 The radiation spectrum for a black body at
         6000 K, an AM0 spectrum, and an AM1.5G
         spectrum………………………………….......................10
Figure 2-1 The effect of light on the current-voltage
         characteristics of a p-junction……………............................13
Figure 2-2 Solar cell equivalent circuit………………...........................13
Figure 2-3 I-V characteristic of a solar cell showing the
         short-circuit current………………………............................14
Figure 2-4 I-V characteristic of a solar cell showing the
        open-circuit voltage………………………..............................15
Figure 2-5 Solar cell’s output power…………………...........................16
Figure 2-6 Loss mechanisms in a solar cell………….............................19
Figure 3-1 Illustration of high temperature diffusion
         Furnace…………………………………….......................22
Figure 3-2 Schematic diagram of the electron beam
          evaporation system………………………...........................23
Figure 3-3 Brief illustration of PECVD………………..........................25
Figure 3-4 Schematic diagram of RF sputter system…..........................27
Figure 3-5 Schematic diagram of DPSS laser……...........28
Figure 3-6 High-Resolution Scanning Electron
         Microscope……………………………….......................29
Figure 3-7 Schematic of a spreading resistance
         Measurement……………………………….......................31
Figure 3-8 The system of quantum efficiency………............................32
Figure 3-9 The system of solar simulation……………..........................33
Figure 4-1 Honeycomb structure by laser patterning…..........................36
Figure 4-2 Four-pulse conditions for before and after wet
          etching………………………………….........................38
Figure 4-3 The spectral dependence of the reflectivity
         for honeycomb with four pulses and
         un-textured with AR………………………...........................40
Figure 4-4 Cross-section and top views of SEM
         micrographs for p-type at different pulse
         conditions………………………………….....................44
Figure 4-5 Process flows for experimental 1...........................................46
Figure 4-6 The SRP result of phosphorous diffusion
          Process…………………………………….......................47
Figure 4-7 The I-V result for experiment 1………..................................................48
Figure 4-8 Cross-section and top views of SEM
         micrographs for two pulses with 1μm metal
         (Al).....................................................51
Figure 4-9 To improving metal contact with porous
         silicon...................................................53
Figure 4-10 Process flows for experimental 2.........................................54
Figure 4-11 The I-V result for experiment 2............................................56
Figure 4-12 Mechanism of laser damage by high-power
          laser pulses....................................................57
Figure 4-13 Position of dislocation cluster..............................................58
Figure 4-14 Transmission electron micrographs showing
          dislocations induced at a laser pulse with an
          energy density of 22J/cm2..................................................58
Figure 4-15 Cross-section and top views of SEM for two
          pulses after wet etching with 3μm depth and
          75J/cm2 pulse energy density...............................................60
Figure 4-16Process flows for experimental 3......................................................61
Figure 4-17Cross-section and top views of SEM for one
          pulse after wet etching with 7μm depth and
          75J/cm2 pulse energy density...............................................64
Figure 4-18 The analysis of EQE for different
          conditions...............................................65
Figure 4-19 The I-V result for experiment 3
............................................66


















List of Tables

Table 4-1 Patterning condition for laser used in
      fabricating honeycomb texture.....................................................36
Table 4-2 Conditions for different pulses................................................37
Table 4-3 Laser Parameters for Experiment 1.........................................45
Table 4-4 Results of experiment 1...........................................................48
Table 4-5 Laser Parameters for Experiment 2.........................................55
Table 4-6 Results of experiment 2...........................................................56
Table 4-7 Laser Parameters for Experiment 2 and 3.......................................65
Table 4-8 Results of experiment 3........................................................66
Table 4-9 current-voltage (I-V) analysis..................................................68

                                

Chapter 1 Introduction

[1] International Energy Agency (IEA), World Energy Outlook 2009

[2]Arnulf Jager-Waldau, “Status of PV research, solar cell production and market implementation in Japan, USA and the European union” European Commission Joint Research Centre; Renewable Energies Unit Ispra, September 2002

[3] Winfried Hoffmann, “Towards an effective European industrial policy
for PV solar electricity” EPIA, June 2004, Paris France, 19th EPVSECv

[4] 王釿鋊, “染料半導體光電池”, 中技社通訊, 41, 5, (2002)
.
[5] http://www.nrel.gov/ncpv/

[6] 莊嘉琛編譯，太陽能工程－太陽電池篇 Chapter2, p.9-11 , 全華科技圖書股份有限公司 (1997)

[7] Photovoltaics CDROM Christiana Honsberg and Stuart Bowden
(http://pvcdrom.pveducation.org/index.html)

Chapter 2 Solar Cell Operation

[1] Photovoltaics CDROM Christiana Honsberg and Stuart Bowden
(http://pvcdrom.pveducation.org/index.html)

[2] 莊嘉琛,太陽能工程－太陽電池篇 Chapter2, p.9-11 , 全華科技圖書股份有限公司 (1997)

Chapter 3 Introduction to the experimental equipments

[1] J. Y. Lin, Annual report of NSC85-2313-E-224-001, Nov 1996

[2] Tomas Markvart, “Solar electricity” JOHN WILEY & SONS (1994)

[3] James D. Plummer, Michael D. Deal, and Peter B. Griffin, Silicon VLSI Technology, Chapter 9, (2000).
[4] 張勁燕，“半導體製程設備”，五南圖書出版股份有限公司，2004年4月二版三刷。
[5] 陳學龍，王水進“IZO透明金屬薄膜之研製及其在GaN基LEDs之應用研究”，國立成功大學/微電子工程研究所2002。
[6]林三寶, “雷射原理與應用”,全華科技圖書股份有限公司,1987年11月二版
[7] http://zekfrivolous.com/faq/sam/dpss1.gif
[8] Dieter K. Schroder, “Semiconductor material and device characterization”, John Wiley & Sons, Inc
[9] Lee E. Fitz Patrick, C. Richard Brundle, Charles A. Evans. Jr. and Shaun Wilson,“Encyclopedia. Of materials characterization: surface, this films”, Butterworth-Hei Newann. M. E. Cowher. And T. O. Sedgwick, J. Electrochem. Soc, 119, 1565, (1972).
[10] http://www.newport.com/
[11] Sciencetech http://0rz.tw/6a48z
Serving The Optical Spectroscopy Community For Over 23 Years (1985~2008)

Chapter 4 Experimental process and results

[1] J. Zhao, A. Wang, M.A. Green, F.Ferrazza , Appl. Phys. Lett. 73 (1998) 1991–1993
[2] Y. Hayafu]i, T. Yanada, and Y. Aoki, SOLID-STATE SCIENCE AND TECHNOLOGY, September 1981 Vol. I28, No. 9
[3] Photovoltaics CDROM Christiana Honsberg and Stuart Bowden
(http://pvcdrom.pveducation.org/index.html)
[4] D. Niinobe, et al., Sol. Energy Mater. Sol. Cells (2010), doi:10.1016/j.solmat.2010.04.035

全文公開日期本全文未授權公開 (校內網路)
全文公開日期本全文未授權公開 (校外網路)
全文公開日期本全文未授權公開 (國家圖書館：臺灣博碩士論文系統)

簡易檢索 / 詳目顯示

相關論文