四元靶-濺鍍製程之銅銦鎵硒薄膜性質之研究｜國立清華大學博碩士論文庫

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研究生：	陳奕璋 Chen, Yi-Chang
論文名稱：	四元靶-濺鍍製程之銅銦鎵硒薄膜性質之研究 Study of CIGS thin films sputtered from a single quaternary-CIGS target
指導教授：	賴志煌 Lai, Chih-Huang
口試委員:
學位類別：	碩士 Master
系所名稱：	工學院 - 材料科學工程學系 Materials Science and Engineering
論文出版年：	2010
畢業學年度：	98
語文別：	英文
論文頁數：	98
中文關鍵詞：	銅銦鎵硒薄膜太陽能電池、二次相、四元靶、濺鍍
外文關鍵詞：	CIGS thin-film solar cell, Second phase, quaternary target, sputtering
相關次數：	點閱：2 下載：0
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In this thesis we developed sputtering process of CIGS absorber layers using a single quaternary-CIGS target. CIGS films were prepared without post-selenization by one-step RF sputtering at different substrate temperature. Additionally, a series of analysis on CIGS films was performed.
Two kinds of quaternary-CIGS targets with different composition were used in this thesis. One is copper-rich and the other is copper-poor. (The composition ratio of the copper-rich is Cu: 22.7 %, In: 18.2 %, Ga: 8.1 %, Se: 51.0 % and the composition ratio of the copper-poor is Cu: 18.0 %, In: 18.2 %, Ga: 8.1 %, Se: 55.7 %.) To investigate properties of CIGS films, it was observed that second phases of copper selenide and indium selenide occurred during fabrication of CIGS films. The copper-selenide phase is conductive and a leakage-current path in CIGS films. Hence we altered the 22%-Cu target into the 18%-Cu target in order to suppress the formation of Cu-Se phases.
Finally, the efficiency of 4.04% was achieved and the effective area up to 0.2 cm2. The CIGS solar cell fabricated by sputtering process without post-selenization is feasible.

Contents
Chapter 1 Introduction    1
Chapter 2 Background    3
2-1 Introduction of photovoltaic devices    3
2-1-1 What is photovoltaics?    3
2-1-2 Solar radiation spectrum    5
2-1-3 Basic principle of solar cells    7
2-1-3-1 I-V characteristic of solar cells    10
2-1-3-2    C-V characteristic of solar cells    13
2-2 Basic characterization of CIGS absorbed layers    16
2-2-1 Introduction of CIGS thin-film solar cells    16
2-2-2 Optical properties of CIGS absorber layers    18
2-2-2-1 Absorption coefficient of CIGS absorber layers    18
2-2-2-2 Tunable direct band gap of CIGS absorber layers    19
2-2-3 Electrical properties of CIGS absorber layers    24
2-2-3-1 Effects of intrinsic defects in CIGS absorber layers    24
2-2-3-2 Interfaces at the two sides of CIGS absorber layers    28
2-2-3-3 Effects of Sodium in CIGS absorber layers    31
2-2-4 Structural properties of CIGS absorber layers    34
2-2-4-1 CIGS orientation issue    36
2-2-4-2 Second phase issue in CIGS absorber layers    38
Chapter 3 Experiment Procedure    40
3-1 Experiment Flow Chart    40
3-2 RF Magnetron Sputtering System    41
3-3 X-Ray Diffraction (XRD)    42
3-4 Transmission Electron Microscopy (TEM)    43
3-5 Field-emission Scanning Electron Microscopy (FE-SEM) equipped with an energy dispersive X-ray spectrometer (EDX)    45
3-6 Solar Simulator and Keithley 4200-SCS    46
3-7 Raman Spectroscopy    47
3-8 Inductively Coupled Plasma-Mass Spectrometer (ICP-MS)    48
3-9 UV-Visible Near IR Absorption Spectroscopy    49
Chapter 4 Results and Discussions    50
4-1 Introduction    50
4-2 Experiment Procedure    51
4-3 Basic analysis of CIGS films sputtered with 22%-Cu target    52
4-3-1 Energy band gap of CIGS films    53
4-3-2 X-ray diffraction of CIGS films    54
4-3-3 Composition ratio of CIGS films    56
4-3-4 Efficiency of CIGS thin film solar cells    57
4-3-5 Brief results and discussions    58
4-4 Analysis of CIGS films deposited with 22%-Cu target    59
4-4-1 XRD of CIGS films    59
4-4-2 SEM of CIGS films    62
4-4-3 TEM-EDX of CIGS films    65
4-4-4 Raman spectroscopy of CIGS films    68
4-4-5 Composition ratio of CIGS films    70
4-4-6 SIMS of CIGS films    72
4-4-7 KCN issue on the second phase of Cu2Se in CIGS films    73
4-4-8 Brief results and discussions    76
4-5 Analysis of CIGS films deposited with 18%-Cu target    78
4-5-1 XRD of CIGS films    78
4-5-2 SEM of CIGS films    80
4-5-3 Composition ratio of CIGS films    83
4-5-4 Energy band gap of CIGS films    85
4-5-5 Raman spectroscopy of CIGS films    86
4-5-6 Resistivity of CIGS films     90
4-5-7 Efficiency of CIGS thin film solar cells    92
4-5-8 Brief results and discussions     93
Chapter 5 Conclusion    95
References    96

                                

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