微致動器於微機電系統中佔有舉足輕重的地位，但是每種致動器皆有其適合的應用範圍，若要使此系統能發揮其最佳狀態，致動器的選用相當重要，本篇論文將針對微抓舉式致動器，進行運動方式，外型尺寸與驅動電壓、頻率等作探討，並且利用改良過的MUMP’s製程製作出元件，並且經由實驗，驗證三角形外型之SDA能有較好的出力與前進能力。
雖然SDA具有大位移量大出力之優點但是受到磨耗與殘餘電荷的影響操作次數無法如梳狀致動器等可以到達幾百萬次運作，因此SDA較適合應用於需要長運動距離，大出力但是操作次數低的情況。本篇論文也將展示三種SDA的應用元件，分別為微立式面鏡，微米級定位平台，與可定位之光衰減器(VOA)，此三種元件將應用於作用後就固定之用途，因此SDA可以發揮其優點且避免其可靠度較低的缺點。

Micro actuator play an important role in micro-electro-mechanical system, but any actuator has it’s adaptive application, if you want the system can do his best, the choice of actuator would become vary important.
This thesis will discuss about the motion、the shape、the dimension、 the frequency and the driving voltage of scratch drive actuator, and fabricate the device by modified MUMP’s. From the experiment we can prove that the triangle scratch drive actuator has better ability of push、pull and motion.

Although scratch drive actuator has the advantage of which can generate force about 100□n and has long working distance but it also has problem about wearing、 residual charge and can’t act so many times as comb drive actuator, so scratch drive actuator is adaptive for long working distance and great generation force but low operation number of times.

This thesis will demonstrate three application for one shoot motion like 3D micro mirror, micro position stage, variable optical attenuator, so we can develop the virtue of scratch drive actuator and avoid the fault of reliability.

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