研究生: |
陳玄評 Chen, Hsuan-Ping |
---|---|
論文名稱: |
16 × 32 CMOS 介電泳驅動電容式生醫感測陣列 A 16 × 32 CMOS dielectrophoresis-based capacitive biosensor array |
指導教授: |
盧向成
Lu, Shiang-Cheng |
口試委員: |
方維倫
Fang, Wei-Lun 鄭裕庭 Cheng, Yu-Ting |
學位類別: |
碩士 Master |
系所名稱: |
電機資訊學院 - 電子工程研究所 Institute of Electronics Engineering |
論文出版年: | 2024 |
畢業學年度: | 112 |
語文別: | 中文 |
論文頁數: | 75 |
中文關鍵詞: | 介電泳 、電容式感測 、指叉電極 、自組裝單層膜 |
外文關鍵詞: | Dielectrophoresis,, Capacitive Sensing, interdigitated electrode, Self- Assembled Monolayers |
相關次數: | 點閱:61 下載:0 |
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隨著電路設計以及半導體製程技術發展成熟,感測器的應用也越來越多樣化,生醫感測晶片將微機電系統與生醫晶片结合,可用來感測特定生物分子。在進行生物樣品分析之前,通常需要對樣品進行前處理、分離、純化、混合、運輸等一系列步驟,若能將細胞操控功能與生醫感測功能整合至同一晶片上,將可以降低實驗的成本與對儀器的需求,並提高實驗效率。
本篇論文提出將CMOS指叉式電容感測電路與介電泳技術結合,使單個晶片可同時具有細胞操控與感測的功能,透過這種晶片,我們能夠在不直接接觸目標物的情況下操控大量微粒,並藉由陣列高效率分析樣品。利用自組裝單層膜(self-assembled monolayers, SAMs)技術將抗小鼠免疫球蛋白G(anti-mouse IgG)修飾於感測電極表面上,對驅動電極施以特定頻率的交流電壓,即可以介電泳力驅動外層包裹小鼠免疫球蛋白G(mouse IgG)的微粒至感測電極上並使兩者產生專一鍵結。位於感測電極表面的微粒會改變電極的等效電容值,此電容變化可透過電路轉換成電壓變化讀出。實驗結果成功的將微粒以介電泳力操控至目標處,並量測到微粒造成的訊號變化。
As circuit design and semiconductor manufacturing technologies mature, the applications of sensors continue to diversify. Biomedical sensing chips, integrating microelectromechanical systems (MEMS) with biomedical chips, have emerged for the detection of specific biomolecules. Prior to analyzing biological samples, a series of steps such as pre-processing, separation, purification, mixing, and transportation are typically required. Integrating cell manipulation and biomedical sensing functions onto a single chip has the potential to reduce experimental costs, instrumentation requirements, and improve experimental efficiency.
This paper proposes the combination of a CMOS integrated capacitive sensing circuit with dielectrophoresis technology, enabling a single chip to possess cell manipulation and sensing functions. Through this chip, manipulation of a large number of particles without direct contact with the target substance is achievable, facilitating efficient sample analysis through an array. Utilizing self-assembled monolayers (SAMs) technology, anti-mouse IgG is modified on the sensing electrode surface. By applying a specific frequency of alternating voltage to the driving electrode, dielectrophoretic force can drive particles coated with mouse IgG to the sensing electrode, creating a specific binding. The particles on the sensing electrode surface alter the electrode's equivalent capacitance, and this capacitance change is converted into a voltage change through the circuit for readout. Experimental results successfully demonstrate the manipulation of particles to the target location using dielectrophoretic force and the measurement of signal changes caused by the particles.
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