本論文旨在製造超導量子迴路的樣品，樣品上有超導量子位元及共面波導，並透過共面波導傳輸微波訊號與超導量子位元產生交互作用，以控制超導量子位元。

　　我製作超導量子位元被稱為Transmon，其中的約瑟夫森接面的製作方式為Cross junction，另外Transmon的製作方式分成兩種，第一種為並聯電容和喬瑟夫森接面兩者分開製作，第二種為兩者一起製作。量測樣品的方法為於低溫(10mk)中用磁場控制超導量子位元的躍遷頻率，並輸入微波訊號量測其反射係數，來觀察超導量子位元的躍遷頻率與磁場的關係、反射係數與微波強度的關係、Charging energy的測量。

　　我製作的Transmon的EJ/EC可以大於30，Pure dephasing為0.34 MHz、Decoherence rate為0.79 MHz和Relaxation rate為0.9MHz，EC為350MHz。

The purpose of this thesis is to fabricate a superconducting quantum circuitsample, which consists of superconducting qubit and coplanar waveguide. Inputmicrowave propagate through coplanar waveguide and interact with superconduct­ing qubit to control superconducting qubit.

The superconducting qubit fabricated is called transmon, and the method tofabricate Josephson junction in transmon is called cross junction. Also transmonhas two methods to fabricate, first is that fabricate shunt capacitance and Joseph­son junction separately in different process, second is that fabricate them together.I measure sample in very low temperature(10mk), adjust magnetic field to con­trol transition frequency of superconducting qubit, measure reflection of input mi­crowave signal to observe relation between transition frequency and magnetic field, relation between reflection and microwave strength, charging energy.

The EJ/EC of qubit was over 30. Pure dephasing was 0.34 MHz, decoherencerate was 0.79 MHz, and relaxation rate was 0.9MHz. EC was 350MHz。

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