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研究生: 傅崇豪
Chong-Hao Fu
論文名稱: 彎曲及電子照射對碳管場效電晶體電特性之影響
Effects of bending and electron irradiation on electrical characteristics of CNTFET
指導教授: 張廖貴術
Kuei-Shu Chang-Liao
口試委員:
學位類別: 碩士
Master
系所名稱: 原子科學院 - 工程與系統科學系
Department of Engineering and System Science
論文出版年: 2007
畢業學年度: 95
語文別: 中文
論文頁數: 93
中文關鍵詞: 奈米碳管電晶體
外文關鍵詞: CNTFET
相關次數: 點閱:1下載:0
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  • 我們使用商業販售的碳管粉末,利用旋塗的方式將碳管均勻地散佈在在製作完成的元件上,藉以完成奈米碳管電晶體。此一方式較長長式的碳管電晶體有著快速且製程簡化的優勢,將有利於我們的研究。
    在利用局部厚氧化層造成奈米碳管不同彎曲程度對電晶體特性的影響上,我們觀察到不同彎曲成的碳管電晶體的確在電性上會有變化。當碳管在落差越大的結構而形成較大的彎曲,則會使得截止電流下降,我們觀察到大部分的元件on/off ratio皆可以到達五個數量級,但也會使得機械穩定度較低,也因為製程結構的因素會使得介電層EOT上升,Subthreshold Swing提高。
    為了更了解碳管與外在環境作用的電性改變現象,我們以低電壓電子束0.7 kV,來照射奈米碳管,觀察電性上的變化。我們觀察到金屬性的奈米碳管在照射低電壓電子束後會有導電性下降的趨勢,而可以在退火後恢復其導電度,或者在室溫長期放置也可以恢復金屬性碳管的導電度。對於半導性的奈米碳管在照射後,場效特性降低,無法開關電晶體,而退火後雖然導電度可以回升,但是卻無法回覆原本的開關特性。


    目錄 摘要……………………………………………………………………Ⅰ 致謝……………………………………………………………………Ⅱ 章節目錄………………………………………………………………Ⅳ 圖目錄…………………………………………………………………Ⅵ 第一章 序論 1.1 奈米碳管的發現與生成…………………………………………2 1.2 奈米碳管的類別及電特性………………………………………3 1.3 奈米碳管在電子元件上的發展與應用…………………………5 1.4 論文概要…………………………………………………………7 第二章 第二章元件結構與實驗步驟 2.1 元件測試結構……………………………………………………17 2.1.1旋塗式CNTFET的測試結構………………………………… 17 2.2 光罩佈局設計……………………………………………………18 2.3 元件製作與實驗流程……………………………………………18 2.3.1 蕭特基式奈米碳管電晶體製作流程………………………19 2.3.2 具厚氧化層彎曲結構之奈米碳管電晶體製作流程………20 2.3.3 電子束照射金屬性碳管實驗流程 …………………………21 2.3.4 電子束照射碳管電晶體實驗流程 …………………………22 2.4 碳管的塗佈………………………………………………………23 2.5 碳管/金屬的接觸阻抗 …………………………………………24 第三章 旋塗式奈米碳管場校電晶體在彎曲結構上的電性量測 3.1 實驗背景與原理…………………………………………………33 3.2 實驗方法…………………………………………………………36 3.2.1 奈米碳管的旋度與移除 ……………………………………36 3.2.2 實驗元件結構 ………………………………………………37 3.2.3 電崩潰實驗 …………………………………………………38 3.3 彎曲結構對於碳管電晶體的電性量測…………………………39 3.3.1彎曲結構對於碳管電晶體開關特性的探討…………………39 3.3.2彎曲結構對於碳管電晶體DIBL效應的探討 ………………41 3.4 彎曲結構對於碳管電晶體的機械穩定度………………………41 3.5 彎曲結構對於碳管電晶體的後續探討…………………………42 3.6 結論………………………………………………………………43 第四章 低電壓電子束照射單壁奈米碳管對電性影響 4.1 研究背景與原理 …………………………………………………65 4.2 實驗簡介 …………………………………………………………67 4.2.1電子顯微鏡的規格……………………………………………67 4.2.2碳管粉末的規格………………………………………………67 4.2.3 實驗元件結構 ………………………………………………68 4.2.4電崩潰實驗……………………………………………………69 4.3 低電壓電子束對金屬性奈米碳管的輻照損傷 …………………71 4.4 低電壓電子束對半導性奈米碳管的輻照損傷 …………………73 4.5 結論………………………………………………………………75 第五章 結論與展望 5.1 結論 ………………………………………………………………87 5.1.1 彎曲對碳管場效電晶體的影響……………………………87 5.1.2 電子束對奈米碳管的幅照損傷……………………………88 5.2 旋塗式奈米碳管蕭基電晶體的改進 ……………………………89 參考文獻 ………………………………………………………………90

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