研究生: |
蔡郁涵 Yu-Han Tsai |
---|---|
論文名稱: |
廣角入射X光波導管分光之可行性研究 Feasibility Study of Beam Splitting in Wide-Angle Incident X-Ray Wave Guides |
指導教授: |
張石麟
Shih-Lin Chang |
口試委員: | |
學位類別: |
碩士 Master |
系所名稱: |
理學院 - 物理學系 Department of Physics |
論文出版年: | 2008 |
畢業學年度: | 96 |
語文別: | 中文 |
論文頁數: | 50 |
中文關鍵詞: | X光波導管 |
外文關鍵詞: | X-ray Wave Guides |
相關次數: | 點閱:1 下載:0 |
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在之前,已對廣角入射X光波導管之垂直波導效應做過研究,如今希望能更進一步的研究此X光波導管分光之可行性,並且分析不同設計之分叉波導管的理論結果。波導管是以四吋矽晶片蝕刻,外表再於上下兩面鍍金,X光以廣角入射波導管,產生繞射光沿著表面行進。主要應用了波導原理及掠角入射波導管之駐波現象,當作分叉波導管之理論基礎。分叉波導管會由於不同夾角、不同寬度、不同設計而產生不一樣的結果,再分別比較其差異。
The mechanism of beam compression in wide-angle incident x-ray waveguides has almost been understood, and now we turn our attention to the feasibility of beam splitting in wide-angle incident x-ray waveguides, and analysis of the theoretical grounds of splitting wave guides of different design. The waveguides were prepared from a 4-inch Si crystal wafer by using ICP process and coating with gold on both sides. An X-ray beam is coupled into the waveguides at wide-angle incidence, and the surface diffraction wave then propagates through the waveguides. The theoretical considerations on waveguiding and propagation of x rays in a planar waveguide are the main theme of this study. Results on waveguiding, beam splitting, and interference for waveguides of different width and angle of incidence will be reported and discussed.
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