本研究目的為發展低成本、高掃描速率的雷射掃描系統。此技術基本概念係透過偏轉單元陣列將掃描範圍切割成若干像素點，各個單元的偏轉角度滿足特定關係，並藉由機構限位的方式來控制單元偏轉角度。本研究從概念發想著手並選出合適機構，針對機構部分，除了探討單元幾何分布，亦透過幾何解析法與Newton-Raphson數值法建立機構運動模型，同時也藉由量測機構推力與偏轉角度來掌握機構基本特性，接著依照機構基本特性建立第一代原型機，觀察原型機在低高頻訊號下能否透過定位塊以及不同單元的組合來控制偏轉角度。此外，亦使用有限元素法相關軟體建立動態估算模型，展現新型數位鏡列掃描技術高速掃描的可能性。驗證新型數位鏡列掃描技術的可行性之後，針對第一代原型機的問題，進行單元機構與撓性線圈的製程開發，探討了機構幾何誤差補償以及多解析度單元的可行性試驗。最後，本研究建立第二代原型機，能夠在解析度4 x 4的範圍中進行點對點的二維掃描。

This research aims to develop a low-cost, High-speed laser scanning system. The basic concept is to divide the scanning range into a certain number of pixels by cascaded mirror array and the relationship of tilting angle of units in cascaded mirror array is a geometric progression, which is controlled by landing points and digital signals. For the mechanism of unit, in addtion to the calculation of layout of units in cascaded mirror array, the kinematic model of mechanism is also built by geometric analysis and Newton-Raphson numerical method. Besides, the basic characteristics of mechanism are realized by force measurement and tilting angle test. Furthermore, the prototype of digital beam scanner is built based on the basic characteristics and the tilting angle controlled by landing points and the combination of different units in low or high operating frequency can be demonstrated by the prototype of digital beam scanner. The dynamic model is also built by finite element software and the simulated result shows that the digital beam scanner can be operated at high frequency. Despite the feasibility has been demonstrated, to solve some problems, the manufacture processes of mechanism and flexture coil have been developed. In addition, the geometric error analysis of mechanism and the feasibility of multi-pixels mechanism have been discussed also. Eventually, the second generation of digital beam scanner is built, which can point-to-point scan within the range of pixels 4 x 4.

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