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研究生： 鍾國丰
Chung, Kuo-Feng
論文名稱： 閉鏈直接回授三次元量床開發
Development of a Coordinate Measuring Machine with Closed Kinematic Chain and Direct Feedback
指導教授： 雷衛台
Lei, Wei-Tai
口試委員: 傅建中
Fu, Chien-Chung
徐永源
Hsu, Yung-Yuan
學位類別： 碩士
Master
系所名稱： 工學院 - 動力機械工程學系
Department of Power Mechanical Engineering
論文出版年： 2018
畢業學年度： 107
語文別： 中文
論文頁數： 63
中文關鍵詞： 六維運動量測裝置 、直接回授控制 、三次元量床
外文關鍵詞： MMD, Direct Feedback Control, CMM
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    • 六維運動量測裝置(Six-DOF Motion Measurement Device，MMD)是由三個組件所構成：一可動板、一固定板、和六支可伸縮量測桿，六支可伸縮量測桿兩端連接可動板和固定板上之六個球穴。量測時將可動板固定在工具端，固定板設置於工件安裝平台，當機台運作時可動板與固定板間產生相對位移和角度變化，藉由六支可伸縮量測桿之桿長變化，以機構轉換計算出工具端相對工件端之六維運動關係。

    本論文研究倒掛型六維運動量測裝置，將固定板放置於可動板上方，可避免可伸縮量測桿與工件干涉，使六維運動量測裝置之工作空間即為量測空間。研究中以實驗室之三線性軸工具機作為驅動機構，配合此一工具機之行程與機構尺寸，設計一倒掛型六維運動量測裝置。

    本研究最後將倒掛型六維運動量測裝置與三線性軸工具機整合成一閉鏈直接回授三次元量床，以雷射干涉儀作為驗證基準，比較驅動機構於基本回授控制時和直接回授控制時之定位差異。在直接回授時，可將機台X、Y、Z方向之定位精度從±2.8μm、±19.95μm、±12.55μm改善至±2.1μm、±1.7μm、±1.7μm，而雙向重現性則從±1.25μm、±3.3μm、±2μm改善至±0.75μm、±0.65μm、±0.35μm。

    Six-DOF Motion Measurement Device (MMD) consists of a movable plate, a fixed plate, and six extensible ball bars, the extensible ball bars connect the sockets of the movable plate and the fixed plate. When machine operates, there will be relative displacement and change of angle between the movable plate and the fixed plate, then the displacement of the extensible ball bars can be used to calculate the six-DOF motion relationship between tool and workpiece.

    This research studied Inverted MMD, by placing the fixed plate above the movable plate to avoid the interference between the extensible ball bars and the workpiece, so that the working space of MMD equaled to the measuring space. The research used a 3-axis machine tool as a driving mechanism and designed Inverted MMD according to the stroke and size of the machine tool.

    Finally, the Inverted MMD and the 3-axis machine tool are integrated into a closed-chain direct feedback coordinate measuring machine (CMM). The laser interferometer was used to measure the performance of the CMM with the basic feedback control and with the direct feedback control. With the direct feedback control, the X, Y and Z direction positioning accuracy of the machine can be improved from ±2.8μm, ±19.95μm, ±12.55μm to ±2.1μm, ±1.7μm, ±1.7μm, and bi-directional positioning repeatability from ±1.25μm, ±3.3μm, ±2μm to ±0.75μm, ±0.65μm, ±0.35μm.

    摘要 ..................................i Abstract.................................ii 誌謝辭 ...............................iii 目錄 ..................................iv 圖目錄 ...............................vii 表目錄 .................................x 1. 前言..............................1 2. 文獻回顧..........................2 2.1. 工具機誤差........................2 2.2. 史都華平台........................4 2.3. 六維運動量測裝置...................4 2.4. 三次元量床........................6 2.5. 研究目的..........................7 3. 六維運動量測裝置...................8 3.1. 六維運動量測裝置之機構轉換..........8 3.1.1. 機構座標定義.......................8 3.1.2. 機構逆轉換........................9 3.1.3. 機構正轉換.......................10 3.2. 六維運動量測裝置之系統特徵.........12 3.2.1. 工作空間分析方法..................12 3.2.1.1. 工作空間幾何方法分析..............12 3.2.1.2. 工作空間數值方法分析..............14 3.2.2. 量化誤差分析方法..................15 3.2.2.1. 量測精度分析方法..................15 3.2.2.2. 賈可比矩陣範數....................16 4. 倒掛型六維運動量測裝置.............17 4.1. 三線性軸工具機....................18 4.2. 支撐座...........................18 4.3. 倒掛型六維運動量測裝置之設計.......19 4.3.1. 可動板和固定板....................20 4.3.1.1. 可動板...........................20 4.3.1.2. 固定板...........................21 4.3.1.3. 倒掛型六維運動量測裝置量化誤差分析..22 4.3.2. 可伸縮量測桿......................26 4.3.3. 倒掛型六維運動量測裝置工作空間......27 4.3.3.1. 最大工作空間......................28 4.4. 龍門設計..........................29 4.5. 支撐座設計........................30 5. 直接回授三次元量床.................31 5.1. 六維運動量測裝置起始化.............31 5.2. 龍門熱補償........................32 5.2.1. 自遞迴系統鑑別補償模型.............33 5.2.2. 熱動態建模實驗以及模擬驗證.........34 5.3. 直接姿態回授......................35 5.3.1. 探頭球心與固定板之關係.............36 5.3.2. 理想機械座標系與固定板座標系之關係..37 5.3.3. 探頭球心誤差計算..................38 5.3.4. 基本回授控制迴路..................39 5.3.5. 直接回授控制迴路..................40 5.4. 探頭系統.........................41 6. 系統實驗與結果....................42 6.1. 倒掛型六維運動量測裝置精度比對.....42 6.2. 直接姿態回授定位量測實驗...........49 6.3. 直接姿態回授動態微米定位實驗........52 6.3.1. X軸微米定位結果....................52 6.3.2. Y軸微米定位結果....................53 6.3.3. Z軸微米定位結果....................55 6.4. 直接姿態回授三次元量測實驗..........56 7. 結論..............................60 參考文獻 ..................................61 附錄 ...................................63

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