研究生: |
杜日行 Jih Shing Tu |
---|---|
論文名稱: |
微流體流動中壁面粗糙度與壓力變化關係 The relationship between pressure drop and surface roughness in misrochannel flow |
指導教授: |
錢景常
C. C. Chen |
口試委員: | |
學位類別: |
碩士 Master |
系所名稱: |
原子科學院 - 工程與系統科學系 Department of Engineering and System Science |
論文出版年: | 2002 |
畢業學年度: | 90 |
語文別: | 中文 |
論文頁數: | 44 |
中文關鍵詞: | 微流體 、壓力變化 、微機電 、微機電製程 、體加工 |
外文關鍵詞: | microchannel, perssure drop, MEMS, bulkmicromaching |
相關次數: | 點閱:2 下載:0 |
分享至: |
查詢本校圖書館目錄 查詢臺灣博碩士論文知識加值系統 勘誤回報 |
本次研究流體在微流道流動中壁面粗糙度與壓力變化之關係,這項研究主要分為兩部份:(1)不同粗糙度之微通道製造。 (2)微通道內流動壓力降量測 。在實驗中將以微機電的加工方法製作不同粗糙度的微通道壁面,探討微流體流動中粗糙度與壓力降的穩態關係。
實驗的結果吾人可發現,在微通道中粗糙度越大則壓力降越
大,而雷諾數對摩擦係數的乘積值會低於理論值。雷諾數對摩擦係數的乘積值,在摩擦係數增加的情況下,乘積值低於理論值的情形會越明顯。當莫迪圖表用於流體流動的情形時,粗糙度及雷諾數會同時影響到摩擦係數的大小,而當摩擦係數低於0.001時,對於微流體流動的影響並不明顯。
This rearech discussing about the relatiomnship between pressure drop and surface roughness. We found that it really exit the difference bteween micro scale & macro scale.
(1) D.Y.Tzou “Macro- To Microscale Heat transfer” p.16
(2) X.F. Peng & B.X. Wang “ Forced-convection & Boiling Characteristic in Microchannel” Heat transfer 1998 Vol.1 Proceeding of 11th IHTC
(3) Marc Madou “Fundamentals of Micro fabrication” chapter1
(4) 黃瑞星 “微機電系統關鍵技術” 第三屆奈米工程暨微機電系統技術研討會論文集 ,1991 p. 1-23
(5) David Pfund & Alireza Shekarriz “Pressure drop measurement in a microchannel” ASME 1998 DSC-Vol. 66 MEMS98
(6) 莊達人 “VLSI 製造技術” 第七章
(7) Shung Wen Kang & Lung-Jieh Yang ,”(110) Orientation Silicon Based Micro Heat Exchanger Channel” ,ISTP-11 1998
(8) Shung-Wen Kang & Jong Shung Chen ,”Surface Roughness of (110) Orientation Silicon Based Micro Heat Exchanger Channel” ,Int. J. Mach. Tool Manufact. , vol. 38, pp.663-668
(9) Jack C.Shih & Chih-Ming Ho “Monotonic & Polyatomic Gas Flow Through Uniform Microchannel” MEMS ASME 1996 DSC vol. 59
(10) Errol B. Arkilic , Martin A. Schmidt “Gaseous flow in microchannel” AIAA paper 1993 no.93-3270
(11) Philippe Renaud, Harald van Lintel, Marc Heuschkel & Louis Guerin “Photo-polymer Microchannel Technologies & Application” Micro total Analysis system ’98 p.17~22
(12) Kin-Choek Pong & Chin-ming Ho “Nonlinear pressure distribution in uniform microchannel” ASME winter annual meeting 1994
(13) KURT E. Petersen, “Silicon as a Mechanical Material” IEEE, VOL. 70, NO. 5, May 1982 p.420~455
(14) Peter C. Simpoaon , Adam T. Wolley “Microfabrication Technology for the Production of Capillary array Electrophoresis Chip” Journal of Biomedical Microdevices 1:1 , 7-26 , 1998
(15) 趙天行、盧慧娟 ”矽深蝕刻製程側壁結構的控制” 第16屆機械工程研討會論文集 民國88年 p. 98~102
(16) Frank M. White ,”Fluid Mechanics” 1997 ,p.326-331
(17) Choondal B. Sobhan & Suresh V. Garimella ,”A Comparative Analysis of Studies on Heat Transfer Fluid Flow in Microchannels”