在微致動器中尋找有效的致動方式一直是研究重點，其中以靜電
力作為驅動方式的梳狀致動器，由於控制容易以及製程與積體電路相
容等優點，因此最為人們所青睞。但是由於製程本身的參數誤差，使
得製作過程無法做出完全對稱的電極，導致當致動器行進時，隨著電
極間相互重疊面積的增加，所產生側向不平衡靜電力也就越來越大。
最後達到一臨界電壓時，可動電極與固定電極相互接觸而短路，致動
本論文改良傳統梳狀致動器驅動端的電極結構，藉由控制補償電
極的電壓，直接針對限制位移量的發生原因去做改善，以增加致動器
所能行進的最大位移量，並利用CMOS 感測電路擷取所需的迴授控
制訊號，以完成整個致動器的系統整合。

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