目前MEMS在有關提升元件表現良率的研究，大多是以改善製程方法來提升良率，鮮少以穩健設計的方法來改善。如果只以改善製程方法來提升MEMS元件表現的一致性，往往需要提高製造成本。為了不提高製造成本而又能提升元件的表現一致性，本研究利用穩健設計方法來設計MEMS元件的尺寸。研究方法首先先推導目標函數，此目標函數是元件尺寸及MEMS元件的表現的函數。接著將此目標函數利用Lagrange乘數法或田口實驗法來探討MEMS元件的表現和製程誤差之關係，以找出使元件表現一致性的最佳元件尺寸。本研究找出製程誤差影響共振頻率一致性最小的微懸臂樑或掃描面鏡的尺寸。為了驗證，分別將微懸臂樑與掃描面鏡以設計的最佳尺寸及其相近尺寸製造出來，並量測不同尺寸頻率之一致性以證明設計結果是最佳的。為了更增加穩健性，本研究尚將一個晶圓分成三個區域以討論分區設計之可行性。

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