本論文主要分為兩個主題，其一為陀螺儀慣性感測器之驅動晶片與共振系統研製，其二為聲波平板模式(Acoustic Plate Mode, APM)感測器的相位偵測電路之研製與量測分析。陀螺儀廣泛應用在軍事、醫學設備、民生用品等定位需求，APM感測器在本研究為應用於半導體蝕刻製程的即時監控。
當陀螺儀處於靜止狀態時，需要致動器將之驅動，使陀螺儀的驅動軸能夠在其自然共振頻率產生振盪。本文設計一驅動電路，並且在不需要其他額外的振動設備下，致動陀螺儀，使陀螺儀在驅動軸產生共振。本研究將驅動電路與陀螺儀本體組合而成一個共振系統，利用靜電力正回授原理與巴克豪森共振判定準則，使此系統形成共振。並將設計、模擬完成的晶片，委託國家晶片中心(CIC)送至台積電製作。測試製成晶片的結果，輸出訊號是方波的形式，並與輸入訊號相位相差90˚。
APM感測器由本實驗學長研製完成，本研究的主要目標，是將感測器置於半導體蝕刻機台上，即時監控蝕刻進行時附著在腔壁上的厚度。本文研製相位偵測電路，並以資料擷取卡擷取電路所輸出的直流電壓訊號，並利用LabVIEW®軟體進行數據分析。當蝕刻進行時，感測器的相位會隨著薄膜厚度而下降，下降率為0.72˚/ng。

There are two topics in this thesis; one researched the vibration system for micro inertial sensor, the other researched the APM sensor phase detecting circuit.
The gyroscope sensor applies to military equipments, medicine (surgical instruments), civil use etc. which need position information. We analyze, design, and implement the driving circuit. The object of the design is a driving system which needs none of additional equipment to actuate the sensor into a vibration mode. So we combine the driving circuit and gyroscope body as an oscillation system. By appropriate phase controlling and high-gain amplifying the signal sensed from one of driving electrodes and feeding it back to the other electrode, oscillation can be stably built up. As the driving chip is completely simulated, we handed it over to CIC for taping out by TSMC. Then we tested the implemented chip to check input and output signal phase has 90˚ phase shift and output signal is □2.5 V square waves.
APM sensor has implemented by our lab senior member. Now we research a phase detecting circuit suited for APM sensor applied for semiconductor process real-time monitor. We used the RF electrical components to implement the circuit, and then tested it function. Finally, we set the sensor on the etching machine wall and used the phase detecting circuit to monitor the sensor phase variation with DAQ card and LabVIEW® program. The film coated on etcher wall thicker and heavier, the more phase decrease. The phase variation is roughly 0.68˚/nm equal 0.72˚/ng.

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