在微機電系統中，許多的微致動器亦或是微感測器，往往因其驅動條件或操作環境的限制，都將受到空氣效應的影響，如加速度計、微扭轉平面鏡。不論是在狹小間隙下所產生的空氣薄膜之擠壓效應，亦或是元件運動時，在自由空間中所受到的等效空氣阻尼，都將影響到元件的操作性能，而另一方面，利用空氣流動所造成之阻尼來製作一具有特殊效能之元件也相當多，如帶通濾波器。因此針對在微結構中，空氣流動所造成空氣阻尼之探討便相當重要，本文將利用在簡單的微懸臂樑結構下，配合不同的覆蓋面積，藉以探討空氣阻尼變化之趨勢，期能對空氣阻尼有一全面的瞭解，並擴展其應用面。

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