研究生: |
王冠宇 Kuan-Yu Wang |
---|---|
論文名稱: |
準分子雷射拖拉之加工形廓分析 Analysis of Machined Profile in Excimer Laser Dragging |
指導教授: |
賀陳弘
Hong Hocheng |
口試委員: | |
學位類別: |
博士 Doctor |
系所名稱: |
工學院 - 動力機械工程學系 Department of Power Mechanical Engineering |
論文出版年: | 2008 |
畢業學年度: | 96 |
語文別: | 英文 |
論文頁數: | 105 |
中文關鍵詞: | 準分子雷射 、拖拉 、聚碳酸酯 |
相關次數: | 點閱:1 下載:0 |
分享至: |
查詢本校圖書館目錄 查詢臺灣博碩士論文知識加值系統 勘誤回報 |
本研究主要是利用準分子雷射透過一個光罩圖案之後,分析在高分子材料上(聚碳酸酯)進行單向或交叉拖拉後的加工形廓和微結構變化情形。為了在拖拉過程中能有效預測加工後之形廓變化,需要發展一個描述雷射加工參數和形廓變化的數學模型。此數學模型將利用實驗方式來驗證其準確性。
本研究呈現了實驗和數值模擬結果。這些結果是藉著改變不同形狀的光罩和不同的實驗參數去進行雷射單向和雷射交叉拖拉的結果。這些實驗參數包括拖拉速度、脈衝重覆頻率、脈衝數、能量密度和光罩圖案的尺寸。從實驗和模擬結果得知,它們兩者之間的誤差值是小於14 %。
依據提出的數學模型,我們可藉由改變雷射加工參數、光罩形狀和尺寸去製作出微小化的車燈透鏡結構。為了證明微小化透鏡結構較傳統的透鏡結構在光學上具有較佳的優點,本研究利用光學模擬方法對這些微小化的透鏡結構進行分析。模擬結果說明微小化的車燈透鏡結構較傳統的車燈透鏡結構可以提供較佳的光學效率。
A laser dragging process to ablate a groove pattern and more sophisticated 3D features on a polycarbonate (PC) sheet through a shape of mask opening is analyzed. To predict the machined profile during the dragging process, a mathematical model describing the relationship between laser machining parameters and the produced profile is developed. The proposed model is verified experimentally.
This study depicts the results of the experiment and numerical simulation in both single and cross dragging using elliptic, triangular and rectangular masks. The operating parameters include the dragging velocity, pulse repetition rate, pulse number, fluence and the opening dimension of the mask pattern. A good agreement between the experiment and simulation with deviation less than 14% is demonstrated.
Based on the proposed model, miniature lamp lens can be manufactured by varying laser operating parameters, mask shape and dimensions. Further, the advantage of the micro-size lamp lens on light efficiency is explored. The results illustrate the optical systems with the micro-feature lamp lens can offer better optical performance than those with macro-feature lamp lens.
Arnold J., Dasbach U., Ehrfeld W., and Hesch K., “Combination of excimer laser micromachining and replication processes suited for large scale production”, Appl. Surf. Sci., vol. 86, pp. 251-258, 1995
Atkins P.W., “Physical Chemistry”, Oxford University Press, 1994
Bagayev S.N., Chernikh V.V., Razhev A.M., and Zhupikov A.A., “Perspectives of using the wavelength of 223 nm of the KrCl excimer laser for refractive surgery and for the treatment of some eye's diseases”, Proc. of SPIE, vol. 3908, pp. 138-145, 2000
Ball Z., Feurer T., Callahan D. L., and Sauerbrey R., “Thermal and mechanical coupling between successive pulses in KrF excimer laser ablation of polyimide”, Appl. Phys. A, vol. 62, pp. 203-211, 1996
Bityurin N., Luk'yanchuk B. S., Hong M. H., and Chong T. C., “Models for Laser Ablation of Polymers”, Chem. Rev., vol. 103, pp. 519-552, 2003
Bhattacharyya A., Streetman B.G., and Hess K., “Theoretical and experimental investigation of the dynamics of pulsed laser annealing of amorphous silicon”, J. Appl. Phys., vol. 52, pp. 3611, 1981
Brandenburg W., “The Replacement of Parabolic Reflectors by "Free Form" Reflectors”, Society of Automotive Engineers (SAE) Technical Papers, 1996
Braren B., Srinivasan R., and Casey K. G., “Nature of incubation pulses in the ultraviolet laser ablation of polymethyl methacrylate”, J. Appl. Phys., vol. 68, pp. 1842-1847, 1990
Braun A., Otte K., Zimmer K., Rudschuck St., Hirsch D., and Bigl F., “Cleaning of submicrometer structures on Si-masters with pulsed excimer laser and reactive ion etching”, Appl. Phys. A, vol. 69, pp. S339-S342, 1999
Burghardt B., Scheede S., Senczuk R., and Kahlert H.-J., “Ablation plume effects on high precision excimer laser-based micromachining”, Appl. Phys. A, vol. 69, pp. S137-S140, 1999
Burns F. C. and Cain S.R., “The effect of pulse repetition rate on laser ablation of polyimide and polymethylmethacrylate-based polymers”, J. Phys. D, vol. 29, pp. 1349-1355, 1996
Chang T.C., Molian P.A., “Excimer pulsed laser ablation of polymers in air and liquids for micromachining applications”, J. Manufact. Sys., vol. 1, pp. 1-17, 1999
Chen Y.H., Zheng H.Y., Wong K.S., and Tam S.C., “Excimer laser drilling of polymers”, Proc. of SPIE, vol. 3184, pp. 202-210, 1997
Cheng W.L., Wang G.J., Yang, J.J., and Pan C.T., “Aspheric micro-lens-array fabricated by excimer laser dragging”, ASME, Micro-Electromechanical Systems Division Publication (MEMS), pp. 463-467, 2002
Cho J.H., Cho M.W. and Kim M.K., “Computer-aided design, manufacturing and inspection system integration for optical lens production”, Int. J. Production Research, vol. 40, pp. 4271-4283, 2002
Chou M.J, “Advancement of LIGA process technique in the present day”, Mechanical Industry magazine, 1996
Crafer R. C. and Oakley P. J., “Laser Processing in Manufacturing,” London: Chapman & Hall, 1993
Dumont T., Lippert T., Wokaun A., and Leyvraz P., “Laser writing of 2D data matrices in glass”, Thin Solid Films, vol. 453-454, pp. 42-45, 2004
Dyer P. E., “Excimer laser polymer ablation:twenty years on”, Appl. Phys. A, vol. 77, pp. 167-173, 2003
Engelmann G., Ehrmann O., Simon J., and Reichl H., “Fabriction of high depth-to width aspect ratio microstructures”, Micro Electro Mechanical System ’92 Tramunde (German), pp. 93-98, 1992
Farsakoglu, D.M. Zengin, and H. Kocabas, “Grinding process for beveling and lapping operations in lens manufacturing”, Appl. Optics, vol. 39, pp.1541-1548, 2000
Feng Y., Liu Z.Q., and Yi X.S., “Co-occurrence of photochemical and thermal effects during laser polymer ablation via a 248-nm excimer laser”, Appl. Surf. Sci., vol. 156, pp. 177-182, 2000
Garrison B. J. and Srinivasan R., “Microscopic model for the ablative photodecomposition of polymers by far-ultraviolet radiation (193 nm)”, Appl. Phys. Lett., vol. 44, pp. 849-851, 1984
Garrison B. J. and Srinivasan R., “Laser ablation of organic polymers: Microscopic models for photochemical and thermal processes”, J. Appl. Phys., vol. 57, pp. 2909-2914, 1985.
Ghantasala M.K., Hayes J.P., Harvey E.C. and Sood D.K., ”Patterning, electroplating and removal of SU-8 moulds by excimer laser micromachining”, Journal of Micromechanics and Microengineering, vol. 11, pp. 133-139, 2001
Gorodetsky G.., Kazyaka T.G.., Melcher R. L. and Srinivasan R., “Calorimetric and acoustic study of ultraviolet laser ablation of polymers”, Appl. Phys. Lett., vol. 46, pp. 828, 1985
Hamm M., “Necessity of New Approaches for LED Headlamp Design”, Society of Automotive Engineers (SAE) Technical Papers (2005)
Hauer M. R., “Laser ablation of polymers studied by time resolved methods”, Department of Chemistry, Heinrich-Heine University Duesseldorf, Dissertation, 2004
Hocheng H. and Wang KY., “Analysis and fabrication of minifeature lamp lens by excimer laser micromachining”, Applied Optics, vol. 46, pp. 1-6, 2007
Hocheng H. and Wang K.Y., “Microgroove pattern machined by excimer laser dragging”, Int. J. Manufacturing Technology and Management, vol. 13, pp. 241-253, 2008
Hodapp T.W. and Fleming P.R., “Modeling topology formation during laser ablation”, Journal of Applied Physics, vol. 84, pp. 577-583, 1998
Hsieh Y.S., “Synthesis and characterization of Photoresists for LIGA-like process”, Dissertation at National Tsing Hua University, 2001
Jellinek H. H. G. and Srinivasan R., “Theory of etching of polymers by far-ultraviolet, high-intensity pulse laser and long-term irradiation”, J. Phys. Chem., 88, pp. 3048-3051, 1984
Jensen M.F., Kruhne U., Christensen L.H. and Geschke O., “Refractive microlenses produced by excimer laser irradiation of poly (methyl methacrylate)”, Journal of Micromechanics and Microengineering, vol. 15, pp, 91-97 ,2005
Jolic K.I., Ghantasala M.K. and Harvey E.C., “Excimer laser machining of corner cube structures”, Journal of Micromechanics and Microengineering, vol. 14, pp. 388-397, 2004
Kawamura Y., Toyoda K., and Namba S., “Effective deep ultraviolet photoetching of polymethyl methacrylate by an excimer laser”, Appl. Phys. Lett., vol. 40, pp. 374-375, 1982
Kawai T., Sawada K. and Takeuchi Y., “Ultra-precision micro structuring by means of mechanical machining”, Proceedings of the IEEE Micro Electro Mechanical Systems, pp. 22-25, 2001
Kim H.J., Kim D.J., Ryu J.K., and Pak S.S., “Removal of the photoresist (PR) and metallic-polymer in the concave-typed storage node using the excimer laser”, Appl. Surf. Sci., vol. 228, pp. 100–109, 2004
K□per S., Stuke M., “Femtosecond UV Excimer laser Ablation”, Appl. Phys. B, vol. 44. pp. 199-204, 1987
K□per S. and Stuke M., “Ablation of polytetrafluoroethylene (Teflon) with femtosecond UV excimer laser pulses”, Appl. Phys. Lett., vol. 54, pp. 4-6, 1989
K□per S., Brannon J. and Brannon K., “Threshold behavior in polyimide photoablation: Single-shot rate measurements and surface-temperature modeling”, Applied Physics A: Materials Science & Processing, vol 56, 1993
Krajnovich D. J. and Vazquez J. E., “Formation of ``intrinsic'' surface defects during 248 nm photoablation of polyimide”, J. Appl. Phys., vol. 73, pp. 3001-3008, 1993
Lazare S. and Granier V., “Excimer laser light induced ablation and reactions at polymer surfaces as measured with a quartz-crystal microbalance”, Journal of Applied Physics, vol. 63, pp. 2110-2115, 1988
Lawes R. A., Holmes A. S., Goodall F. N., “The formation of moulds for 3D microstructures using excimer laser ablation”, Microsystem Technol., vol. 3, pp. 17-19, 1996
Lee Y.C., Chen C.M. and Wu C.Y., “A new excimer laser micromachining method for axially symmetric 3D microstructures with continuous surface profiles”, Sensors and Actuators A: Physical, vol. 117, pp. 349-355, 2004
Liu Z.Q., Feng Y., and Yi X.S., “Coupling effects of the number of pulses, pulse repetition rate and fluence during laser PMMA ablation”, Appl. Surf. Sci., vol. 165, pp. 303-308, 2000
Mayne-Banton V. and Srinivasan R., “Self-developing photoetching of poly(ethylene terephthalate) films by far-ultraviolet excimer laser radiation”, Appl. Phys. Lett. vol. 41, pp. 576-578, 1982
Montelymard C. and Godbillon V., “Signal Lamp System - Vertical Linear Technology”, Society of Automotive Engineers (SAE) Technical Papers, 1999
Montureaux P.D., Haenen L.J.L., Ansems J. and Schuurmans J., “New slim automotive taillight using HiPerVision lamps”, Proc. SPIE, vol. 4775, pp. 135-144, 2002
Naessens K., Van Daele P., and Baets R., “Laser ablation based technique for flexible fabrication of microlense in polymer materials”, Proc. of SPIE, vol. 4426, pp. 124-127, 2002
Naessens K., Ottevaere Heidi, Van Daele P., and Baets R., “Flexible fabrication of microlenses in polymer layers with excimer laser ablation”, Appl. Surf. Sci., vol. 208-209, pp. 159-164, 2003
Natsume K., “The Development of a Rectangular Multi-Reflector on a Free Formed Surface for Signaling Lamps”, Society of Automotive Engineers (SAE) Technical Papers, 1999
Noggle J. H., “Physical Chemistry”, Harper Collins College Publishers, 1989
Ottevaere H., Cox R., Herzig H.P., Miyashita T., Naessens K., Taghizadeh M., Volkel R., Woo H.J. and Thienpont H., “Comparing glass and plastic refractive microlenses fabricated with different technologies”, Journal of Optics A: Pure and Applied Optics, vol. 8, pp. S407-429 , 2006
Pallikaris I.G., Siganos D.S., “Excimer-laser in-situ keratomileusis and photorefractive keratectomy for correction of high myopia”, J. Refractive and Corneal Surgery, vol. 10, pp. 498-510, 1994
Pan C.T., Shen S.C., Hsieh C.C., Chien C.H., and Chen Y.C., “Numerical method to predict and fabricate aspherical microlens arrays using 248-nm excimer laser ablation”, J. Microlitho., Microfab. and Microsys., vol. 3, pp. 555-562, 2004
Paterson C., Holmes A.S. and Smith R.W., “Excimer laser ablation of microstructures: A numerical model”, Journal of Applied Physics, vol. 86, pp. 6538-6546, .1999
Satyanarayana R.V.S. and Rao C.R., “Excimer lasers: emerging applications in ophthalmology” Proc. 1 Reg. Conf. IEEE Eng. Med. Biol. Soc. 14 Conf. Biomed. Eng. Soc., pp. 3.3-3.4, 1995
Sauerbrey R. and Pettit G. H., “Theory for the etching of organic materials by ultraviolet laser pulses”, Appl. Phys. Lett., vol. 55, pp. 421-423, 1989
Schmidt H., Ihlemann J., Wolff-Rottke B., Luther K., and Troe J., “Ultraviolet laser ablation of polymers: spot size, pulse duration, and plume attenuation effects explained”, J. Appl. Phys., vol. 83, pp. 5458-5468, 1998
Sinzinger S. and Jahns J., ”Microoptics”, Wiely, 1999
Srinivasan R. and Leigh W.J., “Ablative photodecomposition: action of far-ultraviolet (193 nm) laser radiation on poly(ethylene terephthalate) films”, J. A. Chem. Soc., vol. 104, pp. 6784-6785, 1982
Srinivasan R., “Kinetics of the ablative photodecomposition of organic polymers in the far ultraviolet (193 nm)”, J. Vac. Sci. Technol. B, vol. 1, pp. 923-926, 1983
Srinicasan V., Smrtic M. A., and Babu S.V., “Excimer laser etching of polymers”, J. Appl. Phys., vol. 59, pp. 3861-3867, 1986
Srinivasan R., Branen B., and Dreyfus R. W., “Ultraviolet laser ablation of polyimide films”, J. Appl. Phys., vol. 61, pp. 372-376, 1987
Srinivasan R., “Ablation of polymers and biological tissue by ultraviolet lasers", Science, vol. 234, pp. 559-565, 1986
Sutcliffe E. and Srinivasan R., “Dynamics of UV laser ablation of organic polymer surfaces”, J. Appl. Phys., vol. 60, pp. 3315-3322, 1986
Tiaw K.S., Goh S.W., Hong M., Wang Z., Lan B., and Teoh S.H., “Laser surface modification of poly(ε-caprolactone) (PCL) membrane for tissue engineering applications”, Biomaterials, vol. 26, pp. 763-769, 2005
Tseng A.A. and Chen Y.T., “Fabrication of high-aspect-ratio microstructures using excimer laser”, Optics and Lasers in Engineering vol. 41, pp. 827-847, 2004
Unamuno S.d. and Fogarassy E., “A thermal description of the melting of c- and a-silicon under pulsed excimer lasers”, Appl. Surf. Sci., vol. 36, pp. 1, 1989
Vartapetov S.K., “Excimer lasers for refractive surgery”, Proc. of SPIE, vol. 5137, pp. 317-322, 2002
Ventzek P. L.G., Gilgenbach R. M., Ching C. H., Lindley R. A., “Schlieren and dye laser resonance absorption photographic investigations of KrF excimer laser-ablated atoms and molecules from polyimide, polyethyleneterephthalate, and aluminum”, J. Appl. Phys. vol. 72, pp. 1696-1706, 1992
Wang S.Y., Huang C.S., Chou H.Y., Lee T.Y., and Chang R.S., “Improvement on the surface roughness of microlens array in the excimer laser machining process”, Proc. of SPIE, vol. 4561, pp. 131-138, 2001
Wei J., Stebani J., Kunz Th., Hahn Ch., Lippert T. and Wokaun A., “Laser ablation and microstructuring of Si-containing polycarbonates and polyestercarbonates”, Proceedings of the SPIE, vol. 3822, pp. 146-54, 1999
Wei M.K. and Yang H., “Cumulative Heat Effect in Excimer Laser Ablation of Polymer PC and ABS”, Int. J. Adv. Manuf. Technol., vol. 21, pp. 1029–1034, 2003
Wissgott C., Scheinert D., Rademaker J., Werk M., Schedel H., and Steinkamp H.J., “Treatment of long superficial femoral artery occlusions with excimer laser angioplasty: long-term results after 48 months”, Acta Radiologica, vol. 45, pp. 23-29, 2004
Yabe A., “Laser Processing of polymers in Macromolecular Science and Engineering: New Aspects”, Springer, 1999
Yang C.R., Hsieh Y.S., Hwang G.Y. and Lee Y.D., “Photoablation characteristics of novel polyimides synthesized for high-aspect-ratio excimer laser LIGA process”, Journal of Micromechanics and Microengineering, vol. 14, pp. 480-489, 2004
Zhupikov A.A., Bagayev S.N. and Chekavinsky V.A., “223 nm excimer laser system for refractive surgery”, Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest, vol. 2, pp. II314 - II315, 2001
Znotins T. A., Poulin D., and Reid J., “Excimer lasers: an emerging technology in materials processing”, Laser Focus/Electro-Optics, vol. 23, pp. 47-52, 1988