在此份研究裡，超薄氮化銦氣體感測器透過使用非極性矽油的外部過濾方式來選擇性感測出次ppm級的氨氣，並應用於肝病的檢測上。就我們所知，實質未摻雜的超薄氮化銦外延層具有較好的電子特性像是狹窄的能隙（0.6-0.7eV）、優異的電子傳遞特性（電子遷移率>1000 cm2/V·s）、以及背景高電子密度（尤其是超過1×1018 cm−3），因而具有高敏感度、快速反應、短恢復時間，以及偵測極限可低於0.2ppm的特性，除此，更具有片密度達1013 cm−2數量級的強表面電子聚集層之異常現象。因此，我的研究目的便是使用超薄（~10nm）氮化銦外延層，開發出選擇性氣體感測器，結合矽油吸收劑在呼出氣體中同時含有丙酮、異戊二烯、乙腈等的環境下感測出氨氣，進而應用肝病檢測上。選擇非極性矽油作為吸收介質，其主要用來吸收實驗中最大干擾氣體丙酮，並讓目標氣體氨氣不會被吸收進而能暴露到超薄（~10nm）氮化銦外延層上，至於其他也存在人體呼出氣體中像是異戊二烯、乙腈、二甲基硫醚等干擾氣體，所含濃度皆遠小於丙酮，且異戊二烯是為非極性氣體，同樣可被矽油所吸收，因此其對於氮化銦氣體感測器的影響可以被忽略；而二甲基硫醚在呼出氣體中所佔的濃度極小，因此也不會被氮化銦氣體感測器所測得，是故選擇矽油作為吸收劑，能使其對於作為肝病檢測的超薄氮化銦氣體感測器應用上，大幅改善於呼出氣體中的氨氣選擇性，如圖1.21所示。此外，也會將呼出氣體中的氨氣及氨氣最大干擾氣體丙酮、異戊二烯、乙腈、二甲基硫醚等定量，使用T201 NH3分析儀測得呼出氣體VOCs中的氨氣含量，並透過GC-ATD-MS定量干擾氣體丙酮、異戊二烯、乙腈、二甲基硫醚等。

In this study, ultrathin InN gas sensor for selective sensing of sub-ppm ammonia gas by using an external filter of non-polar silicone oil for the liver malfunction application. As we know that ultrathin InN epilayer has higher sensitivity, fast response and recovery time, detection limit below the 0.2 ppm. It is because of the fact that ultrathin InN epilayer has superior electronic properties such as narrow band gap (0.6−0.7 eV), exceptional electron transport characteristics (mobility > 1000 cm2/V·s), and a background high electron density (typically in excess of 1×1018 cm−3) for the nominally undoped InN epilayer. Further, unusual phenomenon of a strong surface electron accumulation layer with a sheet density of the order of 1013 cm−2 occurs within a few nanometers from the InN surface. Here my objective is to develop selective gas sensor on the ultrathin (~10 nm) InN epilayer for ammonia gas in a combined matrix of interfrents in exhaled breath such as acetone, isoprene, acetonitrile for the liver malfunction application by using silicone oil absorbent. Here we are using non-polar silicone oil as an absorbing medium. The function of nonpolar silicone oil to absorbed our major interfering acetone gas and pass our target ammonia gas without absorption in silicone oil to further exposed on the ultrathin (~10 nm) InN epilayer. The selectivity of ultrathin (~10 nm) InN gas sensor for the exhaled breath ammonia gas will be improve by using nonpolar silicone oil as an absorbent for the liver malfunction application. But still there are other interferents present in human breath such as isoprene, acetonitrile, dimethyl sulfide (DMS) whose concentration is very small than acetone gas. Isoprene is a nonpolar gas, which will absorb in silicone oil. Therefore, the response of isoprene on InN gas sensor will be negligible. The concentration of DMS in exhaled breath is very small, therefore DMS will be not detected by InN gas sensor. Therefore, the selectivity of the ultrathin InN gas sensor will be improved by using nonpolar silicone oil for the ammonia gas for the liver malfunction application in Figure 1.21. Further, we will quantify exhaled breath ammonia gas as well as exhaled breath acetone, DMS, acetonitrile, isoprene etc. which act as major interferent for the ammonia gas in the liver malfunction application. We will use T201 NH3 analyzer to quantify the exhaled breath ammonia gas in combined matrix of exhaled breath VOCs. In addition, we will use GC-ATD-MS to quantify the major interfrent such as acetone, DMS, isoprene, acetonitrile etc.

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