本論文針對懸掛式單壁奈米碳管共振器的機械與電性特性、單壁奈米碳管成長製程等重點依序加以分析與探討，透過理論分析與有限元素法軟體模擬，預測並計算奈米碳管之共振頻率，並實作出共振器元件，透過奈米碳管本身所具備的單電子傳輸與混波效應，利用鎖相放大電路量測其機械共振訊號。
利用在溝槽結構上直接橫向成長單壁奈米碳管的機制，成長出長度為1 micron之單壁奈米碳管並使其懸掛在深度1.3 micron的溝槽結構上，並於奈米碳管的兩端佈置鈦金屬材料作為電極，接著在常溫常壓的環境條件下利用鎖相放大電路量測其共振訊號，得到此懸掛式奈米碳管共振器元件之機械共振頻率為78 MHz，同時施加閘極直流偏壓可觀察到共振頻率隨偏壓的增加而提高，在1.4 V的閘極偏壓下，共振頻率提高為89.4 MHz。

The purpose of this thesis is to discuss physical and electrical properties of suspended carbon nanotube resonator. First, the resonant frequency of carbon nanotube will be predicted by plastic mechanics and finite element simulation. Then we will measure the resonant signal based on single electron transportation and mixing effect of single-walled carbon nanotube.
We developed a suspended carbon nanotube resonator can be operated in room-temperature and pressure and observed the resonant frequency can be tuned by gate DC bias. Without gate DC bias, the resonant frequency of the device is 78 MHz. With 1.4 V gate DC bias, the resonant frequency of the device is 89.4 MHz.

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