本研究利用熱裂解化學氣相沉積法於快速升降溫系統中高溫成長垂直奈米碳管，以磁控濺鍍Fe催化劑於Si基板上，探討成長參數對於垂直奈米碳管成長高度的影響，其成長參數包含成長時間、催化劑厚度、成長溫度及成長壓力，並探討何種成長參數能有效控制垂直奈米碳管之成長高度。利用XPS分析Fe催化劑於高溫熱處理前、後及成長奈米碳管後化學狀態之差異，進而瞭解成長奈米碳管時Fe催化劑之化學狀態。最後，添加少量Ni於Fe/Si中，形成Fe/Ni/Si催化劑結構，探討對於成長垂直奈米碳管之影響，發現其垂直奈米碳管成長高度是未添加Ni之約5.5倍高，並探討添加少量Ni於此Fe/Ni/Si催化劑結構所扮演之角色。

[1] Radushkevich LV, Lukyanovich VM. “O structure ugleroda, obrazujuc- egosja pri termiceskom razlozenii okisi ugleroda na zeleznom kontak- te” Zurn Fisic Chim, 26, 88-95 (1952).
[2] Oberlin A, Endo M and Koyama T. “Filamentous growth of carbon through benzene decomposition” J. Cryst. Growth, 32, 335-349 (1976).
[3] Iijima S. “Helical microtubles of graphite carbon” Nature, 354, 56-58 (1991).
[4] Iijima S, Ichihashi T. “Single-shell carbon nanotubes of 1-nm diameter” Nature, 363, 603-605 (1993).
[5] Bethune DS, Kiang CH, De Vries MS, Gorman G, Savoy R, Vazquez J, Beyers R. “Cobalt caalysed growth of carbon nanotubes with single - atomic-layer walls” Nature, 363, 605-607 (1993).
[6] M. S. Dresselhaus, G. Dresselhaus and R.Saito, “Physics of carbon nanotubes” Carbon, 33, 883-891 (1995).
[7] H. Dai, “Carbon nanotubes：opportunities and challenges” Surf. Sci., 500, 218-241 (2002).
[8] N. Hamada, S. Sawada and A. Oshiyama, “New one-dimensional conductors：graphitic microtubules” Phys. Rev. Lett., 68, 1579 (1992).
[9] M-F Yu, O. Lourie, M. J. Dyer, K.Moloni, T.F. Kelly and R. S. Ruoff, “Strength and breakong mechanism of multiwalled carbon nanotubes under tensile load” Science, 287, 637-640 (2002).
[10] http://ipn2.epfl.ch/CHBU/papers/ourpapers/Forro_NT99.pdf.
[11] P. G. Collins and P. Avouris, “Nanotubes for electronic” Scientific American December, 69 (2000).
[12] A. Thess, R. Lee, P. Nikolaev, H. Dai, P. Petit, J. Robert, C. Xu, Y.H. Lee, S.G. Kim, A.G. Rinzler, D.T. Colbert, G.E. Scuseria, D. Tomanek, J.E. Fischer, R.E. Smalley, “Crystalline ropes of metallic carbon nanotubes” Science, 273, 483-487 (1996).
[13] P. G. Collins and P. Avouris, “Nanotubes for electronic” Scientific American December, 69 (2000).
[14] R. Z. Ma, J. Wu, B. Q. Wei, J. Liang, D.H. Wu, “Processing and properties of carbon nanotubes-nano-SiC ceramic” J. Mater. Sci., 33, 5243-5246 (1998).
[15] R.H. Baughman, C. Cui, A.A. Zakhidov, Z. lqbal, J.N. Barisci, G.M. Spinks, G.G. Wallace, A. Mazzoldi, D.D. Rossi, A.G. Rinzler, O. Jaschinski, S. Roth and M. Kertesz, “Carbon nanotube actuators” Science, 284, 1340-1344 (1999).
[16] A. Bachtold, P. Hadley, T. Nakanishi and C. Dekker, “Logic circuits with nanotube transistors” Science, 294, 1317-1320 (2001).
[17] P.G. Collins, A. Zettl, H. Bando, A. Thess and R.E. Smalley, “Nanotube nanodevice” Science, 278, 100-103 (1997).
[18] Y. Chen, D.T. Shaw, X.D. Bai, E.G. Wang, C. Lund and W.M Lu, D. D. L. Chung, “Hydrogen storage in aligned carbon nanotubes” Appl. Phys. Lett., 78, 2128-2130 (2001).
[19] J. Kong, N.R. Franklin, C. Zhou, M.G. Chapline, S. Peng, K. Cho and H. Dai, “Nanotube molecular wires as chemical sensors” Science, 287, 622-625 (2000).
[20] W.I. Milne, K.B.K. Teo, G.A.Amaratunga, P. Legagneux, L. Gangloff, J.P. Schnell, V. Semet, V. T. Binh and O. Grogning, “Carbon nanotubes as field emission sources” J. Mater. Chem., 14, 933-943 (2004).
[21] C.V. Nguyen, Q.Ye and M. Meyyappan, “Carbon nanotube tips for scanning probe microscopy：fabrication and high aspect ratio nanometrology” Meas. Sci. Technol, 16, 2138-2146 (2005).
[22] P. Kim and C.M.Lieber, “Nanotube nanotweezers” Science, 286, 2148-2150 (1999).
[23] P. Avouris, J. Appenzeller, R. Martel and S.J. Wind, “Carbon nanotube electronics” Proc. IEEE, 91, 1772-1784 (2003).
[24] E. Reyes, A.A. Krokhin and J. Roberts, “Effective dielectric constants of photonic crystal of aligned anisotropic cylinders and the optical response of a periodic array of carbon nanotubes” Phys. Rev. B, 72, 155118-1-4 (2006).
[25] T. Gabay, Eyal Jakobs, E.Ben-Jacob and Y. Hanein, “Engineered self-organization of neural networks using carbon nanotube clusters” Physica A, 350, 611-621 (2005).
[26] G.Hummer, J.C.Rasaiah, J.P. Noworyta, “Water conduction through the hydrophobic channel of carbon nanotube” Nature, 414, 188-190 (2001).
[27] R. T. K. Baker, M. A. Barber, P. S. Harris, F. S. Feates and R. J. Waite, “Nucleation and growth of carbon deposits from the nickel catalyzed decomposition of acetylene” J. Catal., 26, 51-62 (1972).
[28] R. T. K. Baker, J. J. Chludzinski, N. S. Dudash and A. J. Simoens, “The formation of filamentous carbon from decomposition of acetylene over vanadium and molybdenum” Carbon, 21, 463-468 (1983).
[29] A. Oberlin and M. Endo, “Filamentous growth of carbon through benzene decomposition” J. Cryst. Growth, 32, 335-349 (1976).
[30] R. T. K. Baker, “Catalytic growth of carbon filaments” Carbon, 27, 315-323 (1989).
[31] J. R. Nielsen and D. L. Trimm, “Mechanisms of carbon formation on nickel-containing catalysts” J. Catal., 48, 155-165 (1977).
[32] A. C. Dupuis, “The catalyst in the CCVD of carbon nanotubes－a review” Prog. Mater. Sci., 50, 929-961 (2005).
[33] J. I. Sohn, S. Lee, Y-H. Song, S-Y. Choi, K-I Cho and K-S. Nam, “Patterned selective growth of carbon nanotubes and large field emission from vertically well-aligned carbon nanotube field emitter arrays” Appl. Phys. Lett., 78, 901-903 (2001).
[34] S. Fan, M. G. Chapline, N. R. Frankline, T. W. Tombler, A. M. Cassell and H. Dai, “Self-oriented regular arrays of carbon nanotubes and their field emission properties” Science, 283, 512-514 (1999).

[35] J. Li, C. Papadopoulos, J. M. Xu, M. Moskovits, “High-order carbon nanotube arrays for electronics applications” Appl. Phys. Lett., 75 367-369 (1999).
[36] T. Yanagishita, M. Sasaki, K. Nishio and H. Masuda, “Carbon nanotubes with a triangular cross-section, fabricated using anodic porois aliumina as the template” Adv. Mater., 16, 429-432 (2004).
[37] C. Bower, W. Zhu, S. Jin and O. Zhou, “Plasma-induced alignment of carbon nanotubes” Appl. Phys. Lett., 77, 830-832 (2000).
[38] T. de los Arcos, F. Vonau, M. G. Garnier, V. Thommen, H. G. Boyen, P. Oelhafen, M. Duggelin, D. mathis and R. Guggenheim, “Influence of iron-silicon interaction on the growth of carbon nanotubes produced by chemical vapor deposition” Appl. Phys. Lett., 80, 2383-2385 (2002).
[39] K. Nishimura, N. Okazaki, L. Pan and Y. Nakayama, “In situ study of iron catalysts for carbon nanotube growth using x-ray diffraction analysis” Jpn. J. Appl. Phys.,43, L471-474 (2004).
[40] T. de los Arcos, M. G. Garnier, J. W. Seo, P. Oelhafen, V. Thommen and D. Mathys, “The influence of catalyst chemical state and morphology on carbon nanotube growth” J. Phys. Chem. B, 108, 7728-7734 (2004).
[41] N. M. Rodriguez, M. S. Kim, F. Fortin, I. Mochida and R.T.K. Baker, “Carbon deposition on iron-nickel alloy particles” Appl. Catal. A-Gen, 148, 265-282 (1997).
[42] P. E. Anderson and N. M. Rodriguez, “Growth of graphite nanofibers from the decomposition of CO / H2 over silica-supported iron-nickel particles” J. Mater. Res., 14, 2912-2921 (1999).
[43] A. K. M. Fazle Kibria, Y. H. Mo, K. S. Nahm and M. J. Kim, “Synthesis of narrow-diameter carbon nanotubes from acetylene decomposition over an iron-nickel catalyst supported on alumina” Carbon, 40, 1241-1247 (2002).
[44] W. Qian, T. Liu, Z. Wang, H. Yu, Z. Li, F. Wei and G. Luo, “Effect of adding nickel to iron-alumina catalysts on the morphology of as-grown carbon nanotubes” Carbon, 41, 2487-2493 (2003).
[45] T. Tsoufis, P. Xidas, L. jankovic, D. Gournis, A. Saranti, T. Bakas and M.A. Karakassides, “Catalytic production of carbon nanotubes over Fe-Ni bimetallic catalysts supported on MgO” Diam. Relat. Mater., 16, 155-160 (2007).
[50] C. Singh, M. S.P. Shaffer and A. H. Windle,“Production of controlled architectures of aligned carbon nanotubes by an injection chemical vapour deposition method” Carbon, 41, 359-368 (2005).
[51] H. Cui, G. Eres, J.Y. Howe, A. Puretkzy, M. Varela, D.B. Geohegan, D. H. Lowndes, “Growth behavior of carbon nanotubes on multilayered metal catalyst film in chemical vapor deposition” Chem. Phys. Lett. 374, 222-228 (2003).
[52] W. D. Zhang, Y. Wen, S. M. Liu, W. C. Tjiu, G. Q. Xu and L.M. Gan,“Synthesis of vertically aligned carbon nanotubes on metal deposition quartz plates” Carbon, 40, 1981-1989 (2002).
[53] V.K. Kayastha, Y.K. Yap, Z. Pan, I.N. Ivanov, A.A. Puretzky and D.B. Geohegan,“High-density vertically aligned multiwalled carbon nanotubes with tubular structures” Appl. Phys. Lett., 86, 253105-1-3 (2005).
[54] M.J. Bronikowski,“CVD growth of carbon nanotube bundle arrays” Carbon, 44, 2822-2832 (2006).
[55] http://srdata.nist.gov/xps/；NIST XPS Database.
[56] http://www.lasurface.com/xps/index.php/；Lasurface XPS Database.