近幾年來隨著科技的進步，半導體製程逐漸來到了材料的物理極限，為了繼續維持摩爾定律所預估的成長，積體光學的發展越來越顯重要，而共振腔更是積體光學所不可或缺的元件。此篇將使用近紅外線有機發光染料IR-26，量測並設計對應其發光波段1310奈米之共振腔結構；將先量測一開槽環形結構之微米共振腔，評估其作為共振腔之品質因子(Quality factor)與將其與IR-26結合作為發光元件的可行性，並提出此共振腔結構之優化方式與設計其量測系統。接著以開槽環形共振腔之設計作為參考，使用有限時域差分法(Finite-difference time-domain, FDTD)進行模擬，在絕緣層覆矽(SOI)基板上設計出一個共振波段位於1310奈米的二維圓孔光子晶體平板奈米共振腔(2-D Photonic crystal slab nanocavity)，藉由調控共振腔周圍的圓孔減少模態不匹配所造成的散射損耗藉此增加品質因子，並於共振腔中心加入一開槽結構減少其模態體積(Mode volume)，使其擁有良好的Purcell factor，提高共振腔內光與物質的交互作用效率；再於共振腔周圍中加入兩倍晶格常數(Lattice constant)之週期性結構變化，改變共振腔的遠場放光輪廓，達成垂直出光增加其放光效率，同時可增加外部光源垂直入射耦合之效率，此共振腔將可用於發光二極體或是雷射等放光系統。

In recently years, the semiconductor process technology have a substantial advances; however, it still suffer the physical limit of material. For reach the Moore’s law, the advances of integrated optics is the key subject. The resonant cavities are the essential elements in the integrated optics. Here we select the near-infrared organic laser dye IR-26 to be the gain medium, then measure and design the resonant cavity which its resonance wavelength at 1310 nm. The characteristic of slot ring microcavity have been measured to assess the probability of combination with IR-26. Then we optimize the slot ring structure and design the better measurement to collect the data. Based on the slot ring mucrocavity’s result, we further design the photonic crystal nanocavity. Here we utilize the finite-difference time-domain to simulate the 2-D photonic crystal slab nanocavity on the silicon on insulator, and the design resonant wavelength at 1310 nm. By adjusting the air hole around the cavity and adding a slot in cavity center, we optimize the cavity’s quality factor and mode volume, enhance its light-matter interaction. For increasing the vertical emission efficiency, the extra cyclical changes be added on the structure around the cavity to transform the far-field profile. It’s also mean the vertical coupling efficiency be increased too. With the IR-26, the cavity can be a LED or laser.

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