常見的薄膜電池由鋰嵌入陰極(如V2O5、LiCoO2、LiMn2O4)、鋰金屬陽極與鋰磷氧氮化合物(LixPOyNz)為電解質所組成。其中以結晶狀的LiCoO2為陰極具有高的能量密度與功率，LiCoO2的結晶化程度對電池的效能有很大的影響，所以LiCoO2微結構的研究是很重要。
掃瞄式電子顯鏡及掃描探針顯微鏡觀察得知，LiCoO2薄膜為柱狀結構所組成，其大小為150nm至200nm；進一步再藉著穿透式電子顯微鏡觀察得知，柱狀結構是由不同結晶方向的晶粒所組成，其大小為30nm至50nm而每個晶粒又由許多方向相似但不連續的奈米晶粒(nanocrystal)所組成，當退火溫度達到400℃時，這些奈米晶粒開始成長，而非晶質相的含量也退火溫度的上升逐漸變少；當退火溫度達到700℃時，LiCoO2薄膜已經形成30nm至50nm大小的晶粒，而電池的電容量已可達理論值69μAh/cm2-μm。

The components of the active thin-film battery are a lithium intercalation cathode, e.g, V2O5、LiCoO2、or LiMn2O4, and a lithium metal separated by lithium phosphorus oxynitride electrolyte. Among the material , batteries with crystalline LiCoO2 cathodes have highest energy and power densities, and the performance of batteries is affected by crystallization of LiCoO2 cathodes. Studies for microstructure of LiCoO2 cathodes play an important role in development of the thin-film battery.
LiCoO2 films composed of 0.15μm-to-0.2μm columnar structure was observed by scanning electron microscope and atomic force microscope, and the columnar structure consisting of 30nm-to-50nm grains was observed by transmission electron microscope. In each grain, there were many discontinuous nanocrystals with similar crystalline direction. After annealing at 400℃，the nanocrystals started to grow and combined with another nanocrystals. Decreasing of the quantity of amorphous phase came along with increasing annealing temperature. The 30nm-to-50nm grains was formed in LiCoO2 films without amorphous phase, and the capacity density of LiCoO2 cathodes could reach theoretical values 69μAh/cm2-μm.

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