應用於神經訊號偵測之軟性奈米碳管電極｜國立清華大學博碩士論文庫

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研究生：	徐慧琳 Hsu, Hui-Lin
論文名稱：	應用於神經訊號偵測之軟性奈米碳管電極 Flexible Carbon Nanotube Electrode for Neuronal Recording
指導教授：	游萃蓉 Yew, Tri-Rung
口試委員:
學位類別：	碩士 Master
系所名稱：	工學院 - 材料科學工程學系 Materials Science and Engineering
論文出版年：	2009
畢業學年度：	97
語文別：	英文
論文頁數：	67
中文關鍵詞：	軟性電極、奈米碳管電極、神經訊號偵測
外文關鍵詞：	flexible electrode, CNT electrode, neuronal recording
相關次數：	點閱：1 下載：0
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Si-based MEMS-electrodes have been employed widely to investigate the physiological functions of the brain. However, the rigid Si materials easily damaged the target tissues and consequently will be an obstacle for the long-term usage recording application. This research is to use polyimide flexible substrates to resolve above damaging issue and integrated carbon nanotubes (CNTs) as the recording materials onto the flexible substrates.
Results show that CNTs were successfully grown on flexible polyimide substrates at □ 400 °C as electrodes for extracellularly neuronal recording. The electrical charge transfer and electrochemical properties of CNTs electrodes were significantly enhanced by UV-ozone exposure, which induced the C-O, C=O, O–C=O bonds formation on CNTs lowering CNT/electrolyte interfacial impedance and increasing interfacial capacitance. Demonstrations of good biocompatibility, durability, adhesion, and neuronal recording capabilities suggest this flexible UV-ozone modified CNT electrode a promising candidate for long-term neuronal recording/stimulation applications.

由微機電方法所製作的矽電極，已被廣泛應用於研究腦神經的電生理功能。然而此尖硬的矽材料，容易使所偵測的神經組織受損，此對於未來長時間的訊號偵測應用將會造成極大的阻礙。本研究將對議題而改善，使用軟性基材(polyimide)來取代尖硬的矽材料，並利用奈米碳管為主要的感測材料取代矽電極而製作出軟性奈米碳管電極。
本研究結果顯示奈米碳管可成功在低於 400°C成長於軟性基材(polyimide)上，且成功製成軟性奈米碳管電極紀錄到神經訊號。且軟性奈米碳管電極的電傳遞及電化學能力可利用紫外線臭氧處理而有進一步的提升。實驗結果顯示，紫外線臭氧處理會在奈米碳管外管璧上形成 C-O, C=O, O–C=O 化學鍵結, 進一步降低奈米碳管與電解質溶液之間的電阻抗及提升介面電容。除此之外，紫外線臭氧處理之軟性奈米碳管電極具有好的生物相容性，黏附力，大氣下保存能力，及良好神經訊號偵測能力，顯示本研究所研發之軟性奈米碳管電極具有極大潛力於未來長時間神經訊號偵測應用。

English Abstract    1
Chinese Abstract    2
Acknowledgement    3
Contents    6
Chapter 1  Introduction    8
Chapter 2  Literature Review    10
1 Si-based Multi-Microelectrodes    10
2 Flexible Electrodes    11
3 Flexible Cabon Nanotubes (CNTs) Electrodes    12
Chapter 3  Experimental    13
1 Design and Fabrication of Flexible CNT Electrodes    13
1.1 Structure Wafer Preparation    13
1.2 CNTs Grown on Flexible Substrates    15
1.3 UV-Ozone Exposure    16
2 Characterization instruments    17
2.1 Morphology Inspection by SEM    17
2.2 Electrical Characterization    18
2.3 Surface Wettability    19
2.4 Microstructure Analysis by HRTEM    20
2.5 Degree of Graphitization Analysis    21
2.6 Chemical Bonding Analysis    24
3 Action Potential Signal Detection    24
4 Bio-Compatibility Test    26
Chapter 4  Results    28
1 CNT Growth on Flexible Polyimide Substrates    28
1.1 CNT Growth versus Process Temperature    28
1.2 CNT Growth versus Ni Catalyst Thickness    32
1.3 CNT Growth versus Process Pressure    33
1.4 Optimum CNT Growth Process Parameters    34
2 Physical and Electrical Properties Correlation    36
2.1 CNTs by Various Growth Time    36
2.2 UV-Ozone Modified CNTs versus As-Grown CNTs    38
3 Chemical Property Analysis of UV-Ozone Modified CNTs    42
4 Structure Characterization of UV-Ozone Modified CNTs    46
5 Long-Term Usage and Adhesion Tests    49
6 Action Potential Signal Detection    52
7 Bio-Compatibility Test    53
Chapter 5  Discussion    57
1 Flexible CNTs Electrodes    57
2 UV-Ozone Exposure Induced Impedance Reduction    58
3 Action Potential Signal Detection    60
4 Neuron Cell Culture    61
Chapter 6  Conclusion    62
Chapter 7  Suggestion to Future Work    63
Chapter 8  Reference    64

                                

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