摘 要

本論文提出微閥與質流量感測器的整合製程，設計並製作了熱式內建通道型流量感測器及熱挫曲致動式微閥模組，並且建立共用測試平台，將質流量感控元件的設計、製作、封裝、測試程序標準化。

本論文研究所製作的熱式內建通道型流量感測器有兩種類型，一是矽薄膜型，一是Polyimide薄膜型。矽薄膜型流量感測器在定電壓操作模式下量測氮氣，在300 sccm的流量範圍內，解析度達 1 sccm；矽薄膜型流量感測器亦可以量測液體，量測水的流量範圍達3g/min。本論文並且提出簡易量測方法，以預判熱式內建通道型流量感測器在雙根熱敏電阻定溫操作模式下的輸出特性；根據此判定法，可明顯判斷Polyimide薄膜型流量感測器的靈敏度較矽薄膜型流量感測器為佳。本論文更進一步引進矽長型質量塊(Channel Modulator)以調整流道結構，有效改進Polyimide薄膜型流量感測器的線性度及量測範圍。

本論文研究所製作的熱挫曲致動式微閥有三種類型，一是薄膜式(Membrane Type)微閥，一是橋式(Bridge Type)微閥，一是十字式(Cross Type) 微閥。薄膜式微閥的控制流量範圍為 16 sccm。橋式微閥的控制流量範圍為 165 sccm，橋式微閥開啟反應時間為 349 ms，關閉反應時間為 572 ms。

Abstract

A monolithic design and fabrication process is proposed and realized for the thermal buckling micro valve and the built-in flow channel mass flow sensor modules in the thesis. The manufacturing procedure for the mass flow sensing and control devices design, fabrication, package, and testing is standardized through the concept of module design and the common testing platform.

There are two types of built-in flow channel mass flow sensor fabricated in the thesis; one is silicon membrane type, the other is polyimide membrane type. The sensitivity of the silicon membrane type flow sensor is about 1sccm for nitrogen measurement biased by constant voltage for 0~300 sccm measurement range. The silicon membrane type flow sensor could also be applied for liquid flow measurement. The water flow measurement range is about 3g/min。An easy way to compare different sensor characteristics is proposed to show the better sensor structure design. The polyimide membrane type flow sensor exhibits superior characteristics than the silicon membrane type by this way. The measurement range and linearity of the polyimide membrane type flow sensor is significantly improved by the introduction of Silicon Channel Modulator.

Three thermal buckling micro valves are fabricated in the thesis; membrane-type, bridge-type and cross-type. The flow control range of the membrane-type micro valve is about 16 sccm. The flow control range of the bridge-type micro valve is improved to 165 sccm. The response time of the bridge-type micro valve is measure: 349 ms to open, 572 ms to close.

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