研究生: |
郭雅翎 Ya-Ling Kuo |
---|---|
論文名稱: |
溶凝膠法製備鐵、鈮、鈦摻雜之鋯酸鉛鋇薄膜 Fe-, Nb-, and Ti-doped (Pb,Ba)ZrO3 thin film prepared by sol-gel process |
指導教授: |
吳振名
Jenn-Ming Wu |
口試委員: | |
學位類別: |
碩士 Master |
系所名稱: |
工學院 - 材料科學工程學系 Materials Science and Engineering |
論文出版年: | 2006 |
畢業學年度: | 94 |
語文別: | 中文 |
論文頁數: | 116 |
中文關鍵詞: | 鋯酸鉛鋇 、鐵摻雜 、鈮摻雜 、鈦摻雜 、調變 、鈣鈦礦 、順電相 |
外文關鍵詞: | PBZ, Fe-doped, Nb-doped, Ti-doped, tunable, paraelectric, perovskite |
相關次數: | 點閱:2 下載:0 |
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本實驗以化學溶液溶凝膠法(sol-gel)在白金基板上成功鍍製平整緻密的鋯酸鉛鋇,(Pb0.6,Ba0.4)ZrO3 (PBZ)薄膜,並以鐵(Iron, Fe)、鈮(Niobium, Nb)、及鈦(Titanium, Ti)等元素作1%、5%、10%的摻雜。實驗中所選用的摻雜元素均為針對鋯位置的取代,除了摻雜元素種類及濃度的變化外,亦對熱處理溫度對薄膜性質的影響加以探討。
鐵元素的摻雜大幅改變了PBZ的微觀形貌,介電常數與調變值都得到大幅的改善,而因價數差異造成缺陷平衡的改變,使漏電流行為發生了改變;鈮元素的摻雜有效降低了散逸因子,同時調變值的提高使優異值(Figure of merit)非常優秀,漏電流對電場的行為亦非常穩定;而鈦元素雖然在鈦酸鉛鋇(PZT)中被認為是造成疲勞的主要原因,但對於PBZ的介電常數與調變值有很大的幫助,即使損失提高,但其優異值仍較摻雜前薄膜出色。
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