研究生: |
詹雅婷 |
---|---|
論文名稱: |
Modified VEWMA回饋控制器在兼具平移與漂移之IC製程的績效表現 |
指導教授: | 曾勝滄 |
口試委員: | |
學位類別: |
碩士 Master |
系所名稱: |
理學院 - 統計學研究所 Institute of Statistics |
論文出版年: | 2007 |
畢業學年度: | 95 |
語文別: | 中文 |
論文頁數: | 53 |
中文關鍵詞: | 批次控制 、EWMA回饋控制器 、隨機平移 、線性漂移 、變動折扣因子 |
相關次數: | 點閱:2 下載:0 |
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針對生產製程兼具隨機平移和線性漂移等現象,目前尚無批次控制方法在此架構下討論,不過已有不少相關文獻分別探討僅包含隨機平移或線性漂移之製程。針對有隨機平移的生產製程,Chen and Elsayed (2002) 提出一描述隨機平移現象的模型,並推導出EWMA回饋控制器之最適固定折扣因子;而針對有線性漂移的生產製程,Tseng, et al.(2007) 提出Modified VEWMA回饋控制器,以簡單的回饋控制機制來克服製程存在線性漂移現象,同時利用變動折扣因子加快製程產出的收斂速度。本論文主要探討Modified VEWMA回饋控制器在製程兼具隨機平移和線性漂移的情況下之績效表現,以及有別於Tseng, et al.(2007) 限制在指數遞減之變動折扣因子選取方式,採用解析解的方法推導出最適變動折扣因子,最後將以模擬研究比較不同變動折扣因子挑選方式之Modified VEWMA以及Chen and Elsayed (2002) 回饋控制器之績效表現。
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