本研究結合了三種有利於氫氧燃料電池陰極反應之關鍵要素，製作一具備良好陰極反應效能之微型氫氧燃料電池系統，其體積與市面AA電池(三號電池)相當，僅需使用到少量燃料(陽極氫氣(20 ml/min)與陰極氧氣(40 ml/min))即可在觸媒承載量僅為0.69 mg/cm2之條件下測試獲得最佳功率密度高達26 mW/cm2；換算成Pt觸媒利用率相當於38 W/g之高效能微型氫氧燃料電池，此成果已經超越目前所有與微型燃料電池相關文獻所發表之觸媒利用率。本研究所整合之關鍵要素分別為1.奈/微米結構，可提供4個數量級以上的反應比表面積，有效提升單位面積反應效能、2.微交錯結構，提供3個Mpa以上的介面強度，可有效降低介面阻抗、3.微放射狀反應區設計，結合液態質子交換膜填入時的自旋製程，可大幅提升陰極端氧氣擴散至反應三相區的能力，並促進Pt觸媒於陰極端之有效利用率。
本研究之研發過程所開發的新技術包含了微電極結構之設計與製作、微系統封裝技術之開發與應用、微電極結構之測試與驗證以及全電池系統之整合與測試等技術。在製程上應用了微系統製程中善用的黃光微影技術、深蝕刻技術、鍍膜技術、奈米碳管製造技術、無電鍍白金還原沉積技術以及奈微尺度流體理論針對微型燃料電池結構之製作與組裝。
在陰極半電池效能的驗證上，利用了電化學檢測技術中的電化學循環伏安法、交流阻抗分析技術進行檢測，測試結果指出陰極反應在以3000 rpm條件下填入液態質子交換膜時的自旋速度呈現了最佳化之條件；此條件於陰極半電池測試中獲得42.5 mA/cm2之陰極效能以及分別為2.32 Ω-cm2與4.49 Ω-cm2的氧氣擴散阻抗以及電荷轉移阻抗。而全電池測試結果與陰極半電池測試趨勢相符，於相同條件下(3000 rpm)可獲得最佳功率26 mW/cm2。此結果證實了藉由本研究整合技術所製作出來的陰極反應區結構不但具有極佳的效能，並且可以被推廣應用於微型質子交換膜燃料電池、微型直接甲醇燃料電池或是微型甲醇重組式燃料電池。而本技術在未來實現可攜式微型能量源商品化之目標上具備相當龐大的潛力。

A silicon-based and fully integrated micro proton exchange membrane fuel cell (μ-PEMFC) system is introduced in this paper, which carry out high efficient catalyst utilization and outstanding cell performance. The system size is comparable to an AA battery and consumes a very low fuel requirement (20 ml/min of hydrogen at the anode, and 40 ml/min of oxygen at the cathode). The novel design integrates micro- and nano-structures that leads to higher reaction rate due to larger surface areas, reduced impedance of fuel diffusion due to micro-patterned radial type reaction chamber incorporating a spinning-in proces that creates extra three-phase zones, and improved interfacial strength and reduced ohmic impedance due to micro-interlocks of a single cell. The best performance in the current study is 26 mW/cm2 with only 0.69 mg/cm2 of Pt catalyst; namely, a catalyst utilization ratio of 38 W/g, and is superior to the present micro-fuel cells.
New technologies being developed in this study include the design and fabrication of micro-electrodes, micro-system package, micro-electrodes testing and the integration of a micro-fuel cell system. The processes being employed in this study include micro-lithography, silicon wet and dry etching, thin metal film deposition, chemical vapor deposition, electro-less Pt deposition and micro-fluidic manipulation. Electrochemical cyclic voltammetery (CV) and electrochemical impedance spectrum (EIS) were employed to verify the cathodic efficiency. Half cell testing results indicate the best cathodic performance corresponds to the 3000 rpm liquid NafionR spinning-in condition, which shows a 42.5 mA/cm2 cathodic efficiency and an oxygen diffusion impedance and charge transfer impedance of 2.32 Ω-cm2 and 4.49 Ω-cm2 , respectively. Polarization curves also perform a best power density of 26 mW/cm2, which also corresponds to the 3000 rpm liquid NafionR spinning-in condition. As a result, the integrative micro-silicon base cathoidc electrode could be adopted by whether the direct methanol fuel cells, proton exchange membrane fuel cells or reforming type direct methanol fuel cells. Finally, the study possesses a high potential for the realizing of the commercial mobile micro-power generators in the future.

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