利用紫外光/臭氧提升SU-8結構表面之親水特性

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研究生：	藍麗華 Li-Hua Lan
論文名稱：	利用紫外光/臭氧提升SU-8結構表面之親水特性 Enhancement of Hydrophilic Property on SU-8 Structures by UV/Ozone Treatment
指導教授：	曾繁根 Fang-Gang Tseng
口試委員:
學位類別：	碩士 Master
系所名稱：	原子科學院 - 工程與系統科學系 Department of Engineering and System Science
論文出版年：	2007
畢業學年度：	95
語文別：	中文
論文頁數：	68
中文關鍵詞：	親水、封閉流道
外文關鍵詞：	SU-8, 172-nm Excimer VUV, VUV/Ozone
相關次數：	點閱：2 下載：0
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在微系統製程中SU-8是廣泛備研究使用的材料，但是他本身親水性約在80˚並不良好，在一些需要毛細力的應用上例如微全系統分析…等便受到了限制。為了達到SU-8光阻表面長效親水的目的，我們利用172-nm Excimer VUV這個儀器來進行表面處理，並且可以長時間的將SU-8親水角維持在很低的親水角，以照射時間300秒為例可以到達8˚以下。另一個現象是當經過172nm UV/臭氧處理過後之試片的表面在水沖洗過後後會有親水角上升的現象，判斷是因為表面產生低分子氧化物所造成，因為這生成物與基材表面黏著力較差所以會被水給帶走。內容也對VUV/Ozone的試片進行FT-IR與XPS檢測，並藉此推測出兩種表面如何產生水性官能基反應的機制。
另一個重點是製作SU-8封閉流道並且直接對流道內部進行親水化處理，找出對SU-8薄膜穿透力較佳且又能有效打斷表面鍵結的254nm波長紫外光，對封閉流道進行UV/Ozone的處理後，發現水在流道內的速度增加，與未處理的流道相比有顯著的效果。

摘要......................................................Ⅰ
誌謝......................................................Ⅱ
目錄......................................................Ⅲ
圖目錄....................................................Ⅴ
表目錄....................................................Ⅷ
第一章  研究背景...........................................1
1-1 親水性SU-8的主要應用...................................1
1-2 研究動機...............................................6
1-3 SU-8厚膜光阻..........................................10
1-3-1 SU-8合成方法........................................11
1-3-2 SU-8光阻材料性質....................................12
第二章 文獻回顧...........................................14
2-1 化學方法..............................................14
2-2 電漿處理..............................................19
2-3 紫外光/臭氧處理.......................................22
2-4 文獻整理..............................................24
第三章 實驗設計與方法.....................................26
3-1 Acid-catalyzed cleavage...............................26
3-2 Excimer 172nm VUV/O3處理..............................29
3-2-1 Excimer 172nm VUV/O3儀器原理........................32
3-3 254nm UV/Ozone 於SU-8封閉流道之親水處理...............36
第四章 結果與討論.........................................41
4-1方法一: Acid-catalyzed cleavage........................41
4-2 172nm Excimer VUV親水處理.............................44
4-2-1 表面親水角之量測....................................44
4-2-2 傅立葉轉換紅外光譜儀(FT-IR)分析.....................47
4-2-3 X光電子能譜儀(XPS)分析..............................49
4-2-4 SU-8光阻與172nm VUV/Ozone之反應機制.................53
4-2-4-1 低分子量氧化物(Low-Mocular-Weight Oxidized
        Material).........................................53
4-2-4-2 反應機制..........................................57
4-3 SU-8光阻封閉流道親水實驗..............................60
4-3-1 紫外光波長對SU-8光阻薄膜穿透力實驗..................60
4-3-2製作親水化封閉流道與處理.............................61
4-3-3 親水化封閉流道內流速計算............................63
結論......................................................66
參考文獻..................................................67

                                

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