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研究生: 莊惠芳
Hui-Fang Chuang
論文名稱: 氧化銦錫奈米線製備及單根奈米線電性研究
The study of synthesis of indium tin oxide nanowires and the electrical property of single indium tin oxide nanowire
指導教授: 開執中
Ji-Jung Kai
陳福榮
Fu-Rong Chen
口試委員:
學位類別: 碩士
Master
系所名稱: 原子科學院 - 工程與系統科學系
Department of Engineering and System Science
論文出版年: 2006
畢業學年度: 94
語文別: 中文
論文頁數: 74
中文關鍵詞: 氧化銦錫氧化銦錫奈米線奈米線四點電極量測掃描探針電子顯微鏡
外文關鍵詞: ITO, indium tin oxide nanowire, nanowire, four-point electrical measurement, TEM-STM
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  • 由於奈米線只有一個維度的自由度,加上尺寸上的效應使得奈米線應用到連接導線上有很大的潛力,因此了解單根奈米線的電性傳輸現象是很重要的議題。在本實驗中先利用熱蒸鍍法成長氧化銦錫奈米線,接著使用各種分析儀器TEM、SEM、XRD、XPS、ICP-OES量測合成的氧化銦錫奈米線的定量和定性分析。之後使用TEM-STM系統和四點電極量測法量測單根氧化銦錫奈米線的電性。
    TEM-STM系統可以同時量測單根奈米線的電性又可即時觀測接觸情況,雖然發展不久但已經被用來量測Si、Ge、InAs、ZnO、CdS以及Bi2S3等半導體和半金屬Bi的材料上。然而此系統是一種兩點量測方法,又加上施加微小的電流和電壓,所以接觸電阻對於量測出來的數據有很大的影響,尤其對於量測半導體材料而言影響更鉅。本實驗中氧化銦錫是一種導體材料,因此只要有效的去除接觸電阻的影響就可以快速量測出單根奈米線的電性。所以利用TEM-STM系統量測單根奈米線電性時,一開始使用真空加熱系統來保存試片和金探針,之後當探針與試片接觸後以高起始電壓通過奈米線,以及將電子束幅照聚集在接觸面上,並在接觸面施加壓力等方法減少接觸電阻對整體量測電阻的影響。
    經由上述的步驟,我們可以有效的將低接觸電阻經由不同的分析儀器,我們可以確定合成的氧化銦錫奈米線屬於成長方向[100]的單晶。此外氧化銦錫奈米線電阻率從TEM-STM得到的結果和四點電極量測得到的數值都在相同數量級,兩者的結果也與氧化銦錫薄膜相近,顯示成長的氧化銦錫奈米線仍屬於塊材範圍,此外也證明TEM-STM系統對於量測金屬材料有不錯的可靠度,進而提升以TEM-STM系統研究導體奈米線電性傳輸的潛力。


    摘要……………………………………………………………………….I 誌謝………………………………………………………………………II 目錄…………………………………………………………………III 圖目錄…………………………………………………………………VI 表目錄………………………………………………………………VIII 第一章.前言……………………………………………………………..1 第二章.文獻回顧………………………………………………………..3 2-1 氧化銦錫材料基本特性……………………………………….3 2-2 氧化銦錫結構………………………………………………….3 2-3 氧化銦錫電性………………………………………………….4 2-4 氧化銦錫奈米線的製備…………………………………….5 2-4-1 溶膠溶劑法……………………………………….5 2-4-2 熱蒸度法 ……………………………………………6 2-5 單根奈米線電性量測…………………………………………6 2-5-1 電極式電性量測系統………………………………….7 2-5-2 TEM-STM電性量測系統……………………………9 第三章.實驗步驟與方法………………………………………………21 3-1 實驗方向……………………..………………………………21 3-2 製備氧化銦錫奈米線………………………………………21 3-3 奈米線分析設備與方法...………………………………22 3-3-1 穿透式電子顯微鏡(TEM)…………………….……22 3-3-2 掃描式電子顯微鏡(SEM) …………………………24 3-3-3 X光能量分散光譜儀 (EDS) ………………………24 3-3-4感應偶合電漿放射光譜儀(ICP-OES) ………………24 3-3-5 X光粉末繞射儀(XRD) ………………………………25 3-3-6 電子能譜儀 (XPS) …………………………………25 3-4 奈米線電性量測………………………………………………26 3-4-1 掃描探針電子顯微鏡系統(TEM-STM system) ……26 3-4-1-1 STM探針以及樣品製備……………………27 3-4-1-2 TEM-STM量測……………………………28 3-4-2四點電性量測方法…………………………………….28 第四章.實驗結果與討論……………………………………………….37 4-1 氧化銦錫奈米線的成長………………………………………37 4-1-1初步觀察生成的奈米線………………………………37 4-1-2基板溫度效應…………………………………………38 4-2 奈米線結構及成分分析……………………………………39 4-2-1 XRD結構定性分析……………………………………39 4-2-2 TEM結構分析…………………………………………41 4-2-3 XPS定性分析……………………………………….41 4-2-4 氧化銦錫奈米線定量分析….………………………42 4-3 氧化銦錫奈米線電性量測結果………………………………42 4-3-1 TEM-STM電性量測系統……………………………42 4-3-1-1 改善接觸電阻………………………………43 4-3-1-2 TEM-STM量測方法建立…………………...44 4-3-1-3 TEM-STM量測結果…………………………47 4-3-2 四點電極電性量測…………………………………48 第五章.結論……………………………………………………………67 第六章.未來方向………………………………………………………69 參考文獻………………………………………………………………70

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