The wettability of silicon nanowires and their applications in microfluidics

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研究生：	林沛妤
論文名稱：	The wettability of silicon nanowires and their applications in microfluidics 矽奈米線親疏水性之研究及其在微流道之應用
指導教授：	嚴大任 Yen, Ta-Jen
口試委員:
學位類別：	碩士 Master
系所名稱：	工學院 - 材料科學工程學系 Materials Science and Engineering
論文出版年：	2009
畢業學年度：	97
語文別：	英文
論文頁數：	70
中文關鍵詞：	系奈米線、超親水性
外文關鍵詞：	silicon nanowires, superhydrophilic
相關次數：	點閱：2 下載：0
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Silicon is the significant material in many fields including semiconductor, optoelectronic, bio-sensor and energy generation industries. The reduce of size to micro/nano scale is a prevalent topic in different materials, especially silicon. We utilize the one-dimension silicon nanowires in the fabrication of electroless metal deposition (EMD) method that well-aligned and large area to produce the drastic wetting properties, such as superhydrophilicity and superhydrophobicity.
The superhydrophilicity of silicon nanowires can be applied to decrease the phenomenon of bubble clogging in the microchannels due to the special wetting behavior. However the experiment is not very successful, the different liquid flow can demonstrate the more hydrophilic property in the microchannel with silicon nanowires than the ordinary one. The result of the experiments can provide a solution in the fields of microfluidic and portable power supply systems to reduce the energy consuming in pumping liquid flow.

系奈米線的超親水性質，可應用於微流道等微機電系統

ABSTRACT    I
TABLE OF CONTENTS    II
CHAPTER 1 INTRODUCTION    1
1.1 SILICON NANOWIRES    1
1.2 WETTABILITY    2
1.3 MOTIVATION    3
CHAPTER 2 LITERATURE REVIEW    4
2.1 WET ETCHING PROCESS OF SILICON NANOWIRES    4
2.1-1 Electroless metal deposition method    4
2-2 CONTACT ANGLE    8
2-2-1 Young’s equation    8
2-2-2 Wenzel model    10
2.2-3 Cassie-Baxter model    12
2.2-4 The transition between Wenzel and Cassie-Baxter model    15
2-2-5 Superhydrophobic    21
2-2-6 Superhydrophilic    22
CHAPTER 3 EXPERIMENTAL PROCEDURES    23
3.1 CONTACT ANGLE MEASUREMENT    23
3.1-1 Preparation of samples    23
3.1-2 Measure the contact angles    25
3.2 CHIPS DESIGN    26
3.2-1 Determine the shape of microchannel    26
3.2-2 Determine the experimental process    28
3.1-3 Determine the experimental factors    30
3.3 THE STEPS OF FABRICATION PROCESS    30
3.3-1 superhydrophilic microchannel    31
3.3-2 flat surface of microchannel    37
3-4 DATA COLLECTION    45
3-4-1 Roughness measurement    45
3-4-2 Morphology of microchannels    46
3-4-3 Fluid in microchannels    47
CHAPTER 4 EXPERIMENTAL RESULTS    49
3.1 CONTACT ANGLE ON DIFFERENT SURFACE    49
4.2 THE MORPHOLOGY OF MICROCHANNEL    58
4.3 THE LIQUID FLOW IN MICROCHANNELS    63
CHAPTER 5 CONCLUSION    65
REFERENCE    66

                                

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