原子力顯微鏡是被廣泛運用於奈米量測的設備。輕敲模式的原理是對懸臂樑探針在其共振頻率下振動，利用回饋系統維持固定的探針振幅設定點做三維奈米尺寸的掃描。
本論文目的在探討系統參數對探針磨耗的影響，因在執行量測時探針尖銳度對量測的影像品質影響重大。先前的研究已討論振幅設定點的影響，並利用盲目重建法來估算探針形貌。然而，仍有其他系統參數可能影響探針磨耗，且如何更準確的評估探針狀態也是值得探討的問題
本研究選擇四個系統參數做實驗設計，探針、自由振幅、相對設定點、掃描速率。方法是對一極硬的樣本連續擷取影像，其影像解析度的下降可視為探針磨耗的影響。根據量測結果的變化過程，選擇不同的指標判斷影響探針磨耗的參數。除盲目重建法外，本研究另提出利用樣本表面粗糙度評估探針狀態的方法。
由結果指出，除了振幅設定點外，其他參數也會影響探針磨耗，且參數間可能存在交互作用；利用樣本表面粗糙度評估探針狀態也是可行的方法。

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